Synthesis and Accelerated Testing of Oxynitride Films for High Temperature Applications

非技术描述：迫切需要能够在恶劣环境中工作，使用温度在1000-1500℃范围内的新型保护性陶瓷涂层。这些陶瓷涂层必须具有优异的耐热性、化学稳定性、断裂韧性和耐磨性，因此它们可以可靠地用于高性能发动机、护罩、转子、密封件、滑块和轴承等应用。一个主要的问题是，在极端温度下的反应气体热循环中，传统的陶瓷涂层会开裂和分层。该项目专注于开发和测试Si-Al-O-N和Si-Zr-O-N薄膜涂层，并调整其性能，以实现高性能的耐腐蚀性、耐磨性和断裂韧性。为了有效地测试和评估陶瓷涂层在高温恶劣环境下的性能，正在开发一种微加工测试平台，将陶瓷膜战略性地沉积在其上，以在模拟服役期间遇到的条件下进行加速测试。该项目在高温材料、薄膜技术和微加工领域培养了一名研究生和两名本科生，K-12学生正在接受高温材料科学的教育。与工业伙伴的合作正在被用来评估新涂料的有效性。技术细节：陶瓷薄膜涂层可以承受1000-1500℃的恶劣环境，必须具有优异的耐热性，化学稳定性，断裂韧性和耐磨性。传统的陶瓷涂层在使用过程中会出现裂纹和分层，这是由于在极端温度下反应气体的热循环过程中产生的相互扩散现象、化学反应性和应力。该项目的重点是开发和测试SiAlON和SiZrON薄膜，这些薄膜是用磁控溅射和ecr等离子体辅助电子束蒸发精确制造的。人们正在研究纳米结构，包括梯度和多层组合物，以实现耐腐蚀性、耐磨性和断裂韧性方面的高性能。为了有效地测试和评估涂层在热循环条件下的性能，一个由微加热器、温度传感器、氧化传感器、应力指示器和微滑动夹具组成的微制造MEMS测试平台正在开发中。该项目在高温材料、薄膜技术和微加工领域培养了一名研究生和两名本科生，K-12学生正在接受高温材料科学的教育。正在与工业伙伴合作，以评估SiAlON和SiZrON涂料的有效性。

NON-TECHNICAL DESCRIPTION:There is a critical need for new protective ceramic coatings that can operate in harsh environments with service temperatures in the 1000-1500oC range. These ceramic coatings must exhibit excellent heat resistance, chemical stability, fracture toughness and wear durability so they can be reliably be used in applications such high performance engines, shrouds, rotors, seals, slides, and bearings. A major problem is that conventional ceramic coatings crack and delaminate during thermal cycling in reactive gases at extreme temperatures. This project focuses on developing and testing Si-Al-O-N and Si-Zr-O-N thin film coatings and tailoring their properties to achieve high performance in terms of corrosion resistance, wear resistance, and fracture toughness. To efficiently test and evaluate the performance of the ceramic coatings in high temperature harsh environments, a microfabricated test platform is being developed, upon which the ceramic films are strategically deposited, to carry out accelerated testing under conditions that mimic those that are encountered during service. The project trains a graduate student and two undergraduate students in the areas of high temperature materials, thin film technology, and microfabrication, and K-12 students are being educated about high temperature materials science. Collaborations with industrial partners are being used to evaluate the effectiveness of the new coatings that are developed. TECHNICAL DETAILS:Ceramic thin film coatings that can withstand harsh environments with service temperatures of 1000-1500oC must exhibit excellent heat resistance, chemical stability, fracture toughness and wear durability. Conventional ceramic coatings crack and delaminate during service because of interdiffusion phenomena, chemical reactivity, and stress generation during thermal cycling in reactive gases at extreme temperatures. This project focuses on developing and testing SiAlON and SiZrON films that are precisely fabricated using magnetron sputtering and ECR-plasma-assisted e-beam evaporation. Nanoscale architectures are being investigated including gradient and multilayer compositions in order to achieve high performance in terms of corrosion resistance, wear resistance, and fracture toughness. To efficiently test and evaluate coating performance under thermal cycling conditions, a microfabricated MEMS test platform is being developed that consists of microheaters, temperature sensors, oxidation sensors, stress indicators, and microsliding fixtures. The project trains a graduate student and two undergraduate students in the areas of high temperature materials, thin film technology, and microfabrication, and K-12 students are being educated about high temperature materials science. Collaborations with industrial partners are being pursued to evaluate the effectiveness of the SiAlON and SiZrON coatings.