MEMS Capacitive Plates with Large Tunable Dynamic Range for Voltage Conversion and Power Harvesting

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This project will develop novel MEMS-based capacitive plates with a large tunable dynamic range for power harvesting and voltage conversion. The device is unique in that it uses an innovative multi-cavity design to optimize the power harvesting and step-up voltage conversion efficiency, and electroplated nickel as the main structural material. The goal is to provide significantly improved performance in a small, lightweight, low-cost and maintenance-free energy source. The impacts of this work include new basic science that paves the way for portable wireless sensor systems for aircraft and bridges, educating students with state-of-the-art technology, and boosting US competitiveness and economic development.