Miniaturized Waveguide RF MEMS Tunable Filters

“该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。“本研究的目的是开发一种波导射频微机电系统可调谐滤波器，作为硅中独特的三维微结构。该方法基于结合1）用于小型化腔实现的体微加工，2）用于射频微机电系统平面电路开发的表面微加工，以及3）使用垂直信号路由来偏置嵌入在腔内部的平面电路的高纵横比微结构制造。所提出的高度小型化的三维滤波器使得能够与前端电子设备垂直集成以产生全功能频率，敏捷的微结构，通过结合微制造的三个方面的第一次重大范式转变。该滤波器具有上级电气性能，包括超高选择性、宽带调谐、低损耗、高线性度和极低的调谐功耗。提出了一种介质填充的消逝模式微机械波导滤波器，以提供低损耗，并且相对于其庞大的谐振模式对应物减小滤波器的尺寸。一种平面静电微机电系统电路，通过加载在腔体内制造的电容柱，以超低功耗和优异的线性度执行在非常宽的范围内调谐的任务。垂直信号布线为联合收割机二维和三维微结构的成功组合提供了一种新的途径，并使高性能垂直集成可调谐滤波器成为可能，该项目具有推动新型微加工技术和最先进微波电路发展的潜力。为超小型化、高性能、频率捷变滤波器提供解决方案可增强可重构系统的能力，包括软件定义无线电、电子战系统、雷达和仪器系统。拟议的项目还通过为研究生和本科生制定研究项目以及为高中教师和学生开展课外暑期活动，促进教育和外联活动。少数民族和代表性不足的群体的教育机会将通过与德克萨斯州A M大学的丰富经验工程教师暑期研究计划合作，为少数民族高中教师提供为期一个月的科学和工程研讨会。此外，一年一度的女工程师协会夏令营激励高中妇女加入工程项目。这项工作的研究和教育成果将传播给学术界、工业界和政府部门。

"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."The objective of this research is to develop a waveguide radio-frequency micro-electromechanical systems tunable filter as a unique three-dimensional microstructure in silicon. The approach is based on combining 1) bulk micromachining for miniaturized cavity implementation, 2) surface micromachining for radio-frequency micro-electromechanical systems planar circuit development, and 3) high-aspect-ratio-microstructure fabrication to bias the planar circuit embedded inside the cavity using vertical signal routing.With respect to intellectual merit, the proposed highly miniaturized three-dimensional filter enables vertical integration with front-end electronics to create a fully functional frequency-agile microstructure through the major paradigm shift of combining three aspects of microfabrication for the first time. The filter provides superior electrical performance including ultra-high selectivity, wideband tuning, low loss, high linearity and extremely low power consumption for tuning. A dielectric-filled, evanescent-mode, micromachined waveguide filter is proposed to provide low loss, and also to reduce the size of the filter relative to its bulky resonant-mode counterpart. A planar electrostatic micro-electromechanical systems circuit performs the task of tuning over a very wide range with ultra-low power consumption and excellent linearity by loading the capacitive posts fabricated inside the cavity. Vertical signal routing provides a novel approach to successfully combine two and three-dimensional microstructures and make the high performance vertically integrated tunable filter feasible.With respect to broader impact, the project has the potential to advance the development of novel microfabrication techniques and state-of-the-art microwave circuits. Providing a solution for ultra-miniaturized, high performance, frequency-agile filters enhances capabilities for reconfigurable systems including software-defined radios, electronic warfare systems, radars and instrumentation systems. The proposed project also promotes education and outreach activities by creating research projects for graduate and undergraduate students and extra-curricular summer activities for high school teachers and students. Educational opportunities for minorities and under-represented groups will be explored by collaborating with Enrichment Experience Engineering teacher summer research program at Texas A&M University to provide a one month workshop for minority high school teachers in science and engineering. Also, annual Society of Women Engineers summer camps inspire high school women to join the engineering program. The research and educational results of this work will be disseminated to academic, industrial and government sectors.