SBIR Phase I: Chip-Scale Micromechanical Gyroscope for Angular Roation Detection, Stability and Control

SBIR 第一阶段：用于角旋转检测、稳定性和控制的芯片级微机械陀螺仪

• 批准号: 0912515
• 负责人: David Chen
• 金额: $ 10万
• 依托单位: Sand 9, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-07-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0912515&HistoricalAwards=false
• 关键词: SBIR; Phase; Chip; Scale; Micromechanical

This Small Business Innovation Research (SBIR) Phase I project will develop a vibratory gyroscope with electrostatic actuation and capacitive (or piezoelectric) detection at 0.1 - 1 MHz, a much higher frequency than the ones used by current commercial MEMS gyroscopes and with quality factors exceeding 1000. Because of the high frequencies, the thermal Johnson noise (which typically defines the noise floor for standard micromechanical gyroscopes) is reduced considerably by orders of magnitude. The proposed technology involves a two-mode approach in which the drive force is applied in one mode of the resonator. Under external rotation, this mode is coupled to a second mode, which is detected, either by electrostatic or piezoelectric technique. Using this approach, it is possible to achieve micron-sized chip-scale gyroscopes, manufactured on wafer scale, with performance parameters compared to high-end tactical grade gyroscopes. Micromechanical vibratory gyroscopes have increasing relevance in inertial navigation systems and automotive applications. Beyond these applications which require devices with better sensitivity and performance parameters, a host of new applications in consumer electronics have suddenly emerged. In particular, hand-held devices such as cellular devices and GPS systems, and gaming consoles such as the Nintendo Wii are now including miniature gyroscopes as low cost companion to existing micromachined accelerometers. These applications are in essence similar to the automotive applications in which the gyroscopes are used to detect angular rotation and provide ride stabilization, roll over detection and better traction control. Development of high sensitivity high stability micromechanical gyroscopes will also be of importance to a number of fundamental research questions, which include measuring gravitational red shift for validating the predictions of general relativity. As an inertial system, a highly sensitive gyroscope that can be cooled down to low temperatures can also be used to detect or put limits on new fundamental spin-dependent forces."This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."

这项小型企业创新研究（SBIR）I阶段项目将开发一种具有静电致动的振动陀螺仪和0.1-1 MHz的电容性和电容性（或压电）检测，比当前商业内存陀螺仪和质量超过1000的质量因素（由于高频率）的频率（典型的噪声）的噪声（噪声）的频率高得多，该频率要高得多。通过数量级大大降低。所提出的技术涉及一种两模式方法，其中驱动力以谐振器的一种模式应用。在外部旋转下，该模式耦合到第二种模式，该模式通过静电或压电技术检测到。使用这种方法，与高端战术级陀螺仪相比，可以实现以晶圆尺度制造的微米大小的圆锥形陀螺仪，具有性能参数。微机械振动陀螺仪在惯性导航系统和汽车应用中具有越来越多的相关性。除了需要具有更好敏感性和性能参数的设备的这些应用程序之外，消费电子产品中的许多新应用都突然出现了。尤其是，手持设备（例如蜂窝设备和GPS系统）以及游戏机（例如Nintendo Wii）现在包括微型陀螺仪作为现有微机械加速度计的低成本伴侣。这些应用本质上类似于使用陀螺仪来检测角旋转并提供骑行稳定，滚动检测和更好的牵引力控制的汽车应用。高灵敏度高稳定性微机械陀螺仪的发展对于许多基本研究问题也将很重要，其中包括测量重力红移以验证一般相对性的预测。作为一种惯性系统，可以冷却至低温的高度敏感陀螺仪也可以用于检测或限制新的基本旋转依赖性力。