SBIR Phase I: Synthesis of Hard Magnetic Nanoparticles and Fabrication of Micromagnets for MEMS Applications

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This Small Business Innovation Research Phase I project proposes to develop anisotropic hard magnetic nanoparticles, based on rare earth transition metal compounds, with particle size in the range of 200 nm down to 100 nm. These nanoparticles will be consolidated by screen-printing into permanent magnet structures with dimensions to bridge the gap between the permanent magnet thin films (few nanometers to a few microns) and micromachined permanent magnets (larger than 500 microns). The anisotropic hard magnetic nanopowders consolidated by screen printing can serve as small permanent magnet structures with dimensions between ten microns to hundreds of microns for various devices. The improved magnetic properties will yield enhanced performance in these applications.This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).