SBIR Phase II: Synthesis of Hard Magnetic Nanoparticles and Fabrication of Micromagnets for Microelectromechanical System (MEMS) Applications

SBIR 第二阶段：用于微机电系统 (MEMS) 应用的硬磁纳米颗粒的合成和微磁体的制造

• 批准号: 1026786
• 负责人: Jinfang Liu
• 金额: $ 50万
• 依托单位: Electron Energy Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1026786&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Synthesis; Hard

This Small Business Innovation Research (SBIR) Phase II project aims to develop anisotropic hard magnetic nanoparticles and nanoflakes based on rare-earth transition metal compounds, which can be agglomerated by screen printing and tape casting into micro- or sub-millimeter permanent magnet structures. The excellent magnetic properties, small size and particular morphology of the nanoparticles and nanoflakes will allow for high magnetic performance with dimensions that bridge the current gap between the permanent magnet thin films (about a few microns) and micromachined permanent magnets (typically larger than 500 microns). This project is expected to (1) synthesize permanent magnet nanoflakes and nanoparticles with magnetic properties comparable to those of the bulk counterparts, (2) prepare monolithic isotropic and anisotropic hard magnetic thick films by screen printing, (3) fabricate solitary isotropic and anisotropic hard magnetic thicker films or structures by tape casting, and (4) develop prototypes of sub-millimeter permanent magnet structures for terahertz (THz) devices and micro-undulators.The broader/commercial impact of this project will be the potential to provide stable permanent magnet particles with submicron dimensions in large amount and with close-to-bulk magnetic properties, which will be an enabling technology for the $3.9 billion magnetic MEMS (Microelectromechanical Systems) market. The applications include micro-sensors, -motors, -generators, -undulators, high frequency (THz) vacuum electronic devices etc. The permanent magnet nanoflakes can also be used in anisotropic bonded magnets, which have many industrial applications with a market size of $434 million per year worldwide.

这个小型企业创新研究(SBIR)二期项目旨在开发基于稀土过渡金属化合物的各向异性硬磁纳米颗粒和纳米薄片，这些纳米颗粒和纳米薄片可以通过丝网印刷和流延制成微米或亚毫米的永磁体结构。纳米粒子和纳米薄片具有优异的磁性、小的尺寸和特殊的形貌，这将使其具有高的磁性能，其尺寸可以弥合永磁体薄膜(约几微米)和微机械加工的永磁体(通常大于500微米)之间的电流间隙。该项目有望(1)合成磁性能与块体相当的永磁片和纳米粒子，(2)通过丝网印刷制备单片各向同性和各向异性的硬磁厚膜，(3)通过流延制造孤立的各向同性和各向异性的硬磁更厚的薄膜或结构，(4)开发用于太赫兹(THz)器件和微波荡器的亚毫米永磁结构原型。该项目的更广泛/更广泛的商业影响将是有可能提供大量具有亚微米尺寸和接近块体磁性的稳定的永磁体颗粒，对于价值39亿美元的磁性MEMS(微电子机械系统)市场来说，这将是一项使能技术。这些应用包括微型传感器、电机、发电机、波荡器、高频(THz)真空电子器件等。永磁片还可用于各向异性粘结磁体，这些磁体有许多工业应用，每年全球市场规模为4.34亿美元。