MRI: Acquisition of Nanolithography Equipment

MRI：购置纳米光刻设备

• 批准号: 0922614
• 负责人: Vikram Dalal
• 金额: $ 70万
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0922614&HistoricalAwards=false
• 关键词: MRI; Acquisition; Nanolithography; Equipment

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The objective of this project is to acquire a nanolithography instrument, which will significantly improve the research capabilities at Iowa State and the University of Iowa in the fields of microelectronics, photonics and biology. The nanolithography instrument is an e-Line system, which is capable of 20 nm accuracy and can be used to make nano patterns over large areas. Intellectual merit: The instrument allows for precise patterning at the nanoscale of electronic, photonic and biological materials and devices. It will allow fabrication of photonic crystal structures for improving the efficiency of solar cells. The instrument will be used for defining nanochannels for ordered regrowth of neurons and stem cells and for defining channels that will be utilized for studying the influence of various pesticides on mobility of nematodes, which are a major corn pest. The instrument will also be used to produce the patterns needed for negative index materials for advanced photonic devices such as waveguides and light valves. Broad impacts: The technological impact of the research will be significant in many varied fields such as solar energy conversion, stem cell development, photonic devices and more efficient lighting. There will be significant integration of research and teaching through development of new lab courses and introduction of new lab modules in existing courses. Women and minority students at the graduate and undergraduate levels will be involved in the various research projects and will also benefit from the new lab classes that will be developed.

该奖项由2009年《美国复苏和再投资法案》（Public Law 111-5）资助。该项目的目标是获得纳米光刻仪器，这将显着提高爱荷华州和爱荷华大学的研究能力。爱荷华州在微电子、光子学和生物学领域。纳米光刻仪器是一种e-Line系统，能够达到20 nm的精度，可用于在大面积上制作纳米图案。智力价值：该仪器允许在电子，光子和生物材料和设备的纳米级精确图案化。它将允许制造光子晶体结构，以提高太阳能电池的效率。该仪器将用于定义神经元和干细胞有序再生长的纳米通道，并用于定义将用于研究各种农药对线虫流动性的影响的通道，线虫是一种主要的玉米害虫。该仪器还将用于生产先进光子器件（如波导和光阀）所需的负折射率材料的图案。广泛影响：这项研究的技术影响将在许多不同的领域，如太阳能转换，干细胞开发，光子器件和更高效的照明。通过开发新的实验室课程和在现有课程中引入新的实验室模块，将研究和教学进行重大整合。研究生和本科生一级的妇女和少数民族学生将参与各种研究项目，并将受益于将开发的新实验室课程。