MRI: Acquisition of Double-sided Sub-micron Mask Aligner

MRI：获得双面亚微米掩模对准器

• 批准号: 0420630
• 负责人: Vikram Dalal
• 金额: $ 17.5万
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2005-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0420630&HistoricalAwards=false
• 关键词: MRI; Acquisition; Double; sided; Sub

The objective of this research is to acquire research instrumentation for doing research on photonic waveguides and photonic devices, integrated biosensors, sensors for detection of toxic chemicals, organic semiconductors and neuron regrowth. These devices demand state of the art alignment capability with both front and back alignments. Iowa State has active research programs in each of the above areas, but does not have back and front sub-micron mask aligner. In this proposal, we plan to acquire a Suss MA/BA6 mask aligner capable of sub-micron lithography and of simultaneous back and front alignment so that device can be made on both sides of a substrate and devices in the submicron range can be made. This aligner will complement our existing array of tools, thereby allowing for a significant increase in our research productivity across a large number of disciplines. Intellectual merit and Broad ImpactThe proposed instrument meets a critical need at the University. No other comparable instrument is available at Iowa State. The instrument complements the following tools we own: Alcatel Deep RIE, poly-Si CVD furnace, Standard Si fabrication tools, Metal evaporators, Nanocrystalline Si plasma deposition reactors, Organic LED reactors, Single cantilever AFM tool. The instrument will allow faculty, students and research staff from Chemical Engineering, Electrical Engineering, Materials Science and Engineering, Mechanical Engineering, Physics, Chemistry and Biology to conduct experiments in the fields of photonic bandgaps, directed neural regrowth, nanocrystalline Si devices, integrated chemical and biological sensors based on OLED's and GMR devices, thin film resonators and multi-cantilver AFM tools for combinatorial diagnosis of surfaces. The instrument will be housed at the Microelectronics Research Center (MRC), an inter-disciplinary center at Iowa State where all the complementary facilities exist and are available for use by all the Iowa State faculty, staff and students. A full-time scientist will be in charge of the instrument and will maintain it in addition to some of the other tools. A maintenance account will be set up to charge the users a use-fee to pay for maintenance.There will be significant impact on education of students, both graduate and undergraduate. This instrument, along with the existing instruments will be used for future experimental modules in courses dealing with fabrication of semiconductor, photonic and MEMS materials and devices Approximately 40 graduate students in many disciplines who use MRC facilities, and about 15 undergraduates who do research at MRC as part of their senior design or independent research projects will benefit from the acquisition of this instrument. A significant number of women and minority students are expected to participate in research activities made possible by the acquisition of this instrument. The proposed research activity has potentially broad impacts in the fields of electronic and photonic devices, sensors and neural science and engineering.

这项研究的目的是获得研究仪器，用于研究光子波导和光子器件、集成生物传感器、检测有毒化学品的传感器、有机半导体和神经元再生。这些设备需要最先进的前对齐和后对齐功能。爱荷华州立大学在上述每个领域都有积极的研究计划，但没有前后亚微米掩模对准器。在这个方案中，我们计划获得一种能够进行亚微米光刻和同时进行前后对准的SOSMA/BA6掩模对准器，这样就可以在衬底的两侧制造器件，并制造亚微米范围的器件。这一协调器将补充我们现有的一系列工具，从而显著提高我们在许多学科的研究生产率。智力优势和广泛影响建议的工具满足了大学的关键需求。爱荷华州立大学没有其他类似的仪器。该仪器补充了我们拥有的以下工具：阿尔卡特深度RIE、多晶硅CVD炉、标准硅制造工具、金属蒸发器、纳米硅等离子体沉积反应器、有机LED反应器、单悬臂AFM工具。该仪器将允许来自化学工程、电气工程、材料科学与工程、机械工程、物理、化学和生物的教职员工、学生和研究人员在光子带隙、定向神经再生、纳米晶硅器件、基于OLED和GMR器件的集成化学和生物传感器、薄膜谐振器和用于表面组合诊断的多悬臂AFM工具等领域进行实验。该仪器将安置在爱荷华州的微电子研究中心(MRC)，这是一个位于爱荷华州的跨学科中心，所有辅助设施都存在，爱荷华州立大学的所有教职员工和学生都可以使用。一名全职科学家将负责该仪器，并将除其他一些工具外对其进行维护。将设立维护账户，向用户收取使用费以支付维护费用。这将对研究生和本科生的教育产生重大影响。该仪器和现有仪器将用于未来半导体、光子和MEMS材料和器件制造课程中的实验模块。许多学科约40名使用MRC设备的研究生，以及约15名在MRC进行研究作为其高级设计或独立研究项目的本科生将受益于该仪器的收购。预计将有相当数量的妇女和少数族裔学生参加由于获得这一仪器而得以开展的研究活动。拟议的研究活动可能在电子和光子设备、传感器以及神经科学和工程领域产生广泛影响。