MRI: Acquisition of a Nanoscale Imprint Lithography System

MRI：获得纳米级压印光刻系统

• 批准号: 0922682
• 负责人: Thomas Mantei
• 金额: $ 36.05万
• 依托单位: University of Cincinnati Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2010-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0922682&HistoricalAwards=false
• 关键词: MRI; Acquisition; Nanoscale; Imprint; Lithography

The objective of this project is to acquire a state-of-the-art nanoscale imprint lithography system to provide critical fabrication capabilities for continued research progress in large area, high-throughput, high resolution nanoscale device applications. Intellectual Merit. The acquisition of this nanoimprint system will advance nanoscale science and technology on numerous research projects at the University of Cincinnati and other Southwestern Ohio Universities. These projects include photonic device fabrication and integration, photonic optoelectronic structures, silicon and nanotube-array biosensor fabrication, bioNEMS and labs-on-a-chip, semiconductor nanowire plasmonic biosensors, quantum well infrared photodetectors for long wave infrared applications, and basic single semiconductor nanowire investigations. Each of these projects will benefit from, and in some cases will be made possible by, the acquisition of the nanoimprinter tool. Broader Impact. This nanoimprint system will expand the research capabilities for a wide range of faculty and literally scores of graduate students in their thesis and dissertation research, and will expose undergraduates and summer program students to state-of-the-art fabrication techniques. This acquisition will have a direct and strong impact on the development and training of future U.S. scientists and engineers in nanoscale science and engineering, a critical segment of the nation's workforce. Undergraduate students will be exposed to nanoscale science through a series of structured laboratory experiments integrated with an existing NSF Nanotechnology Undergraduate Education program. Significant collaborative efforts also currently exist between the University of Cincinnati, Xavier University (an undergraduate institution), Miami University, and the University of Dayton.

该项目的目标是获得最先进的纳米压印系统，为大面积、高通量、高分辨率纳米器件应用的持续研究进展提供关键的制造能力。知识价值。该纳米压印系统的收购将推进辛辛那提大学和其他西南俄亥俄大学众多研究项目的纳米科学和技术。这些项目包括光子器件制造和集成、光子光电结构、硅和纳米管阵列生物传感器制造、生物纳米系统和芯片实验室、半导体纳米线等离子体生物传感器、用于长波红外应用的量子阱红外光电探测器，以及基本的单半导体纳米线研究。这些项目中的每一个都将受益于纳米压印机工具的收购，在某些情况下，这些项目将成为可能。更广泛的影响。这种纳米压印系统将扩大研究能力，为广泛的教师和研究生在他们的论文和论文研究，并将使本科生和暑期项目的学生接触到最先进的制造技术。此次收购将对未来美国科学家和工程师在纳米尺度科学和工程领域的发展和培训产生直接和强烈的影响，这是美国劳动力的关键部分。本科学生将通过一系列结构化的实验室实验与现有的NSF纳米技术本科教育计划相结合，接触到纳米科学。目前，辛辛那提大学、泽维尔大学（本科院校）、迈阿密大学和代顿大学之间也存在着重要的合作努力。