Collaborative Research: Heterogeneous Integration of Patterned 3-D Nanotube Supercapacitators on CMOS

合作研究：CMOS 上图案化 3D 纳米管超级电容器的异质集成

• 批准号: 0926093
• 负责人: Bingqing Wei
• 金额: $ 18.26万
• 依托单位: University of Delaware
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0926093&HistoricalAwards=false
• 关键词: Collaborative; Research; Heterogeneous; Integration; Patterned

This cross-disciplinary research project aims at demonstrating a proof of new concept on heterogeneous integration of carbon nanotube supercapacitors on complementary metal-oxide-silicon integrated circuits as reliable on-chip energy sources. Fundamental studies and key issues on design, fabrication and heterogeneous integration of patterned carbon nanotube supercapacitors on the complementary metal-oxide-silicon integrated circuits will be investigated. Patterned carbon nanotube films will be assembled using a template-guide enhanced dielectrophoretic technique which is compatible to the traditional complementary metal-oxide-silicon technology. The fabricated nanotube films will be utilized to construct supercapacitors, which have multi-directional power flow capability as on-chip power sources.The collaborative effort will result in the development of integrated supercapacitors as independent, on-chip, power sources. It will provide an immediate transformative solution to very large scale integrated systems with the significant reduction on size and cost. It will improve system reliability and run-time and stimulate a large variety of new applications ranging from implantable devices, remote healthcare to smart buildings and ubiquitous computing and sensing. A concurrent and integrated educational program is designed to train students in industry-like environments and to enhance their problem-solving techniques and team-work skills. The educational efforts include recruitment and retention of student researchers in engineering education, enhancement of the engineering curriculum at the two research institutions (University of Delaware and University of Arizona), broader education in the society, and outreach to members of underrepresented groups. Moreover, it emphasizes diversity in engineering education and will result in tremendous social benefits.

该跨学科研究项目旨在证明碳纳米管超级电容器在互补金属-氧化物-硅集成电路上异质集成作为可靠的片上能源的新概念。将研究互补金属-氧化物-硅集成电路上图案化碳纳米管超级电容器的设计、制造和异质集成的基础研究和关键问题。图案化碳纳米管薄膜将使用模板引导增强介电泳技术组装，该技术与传统的互补金属氧化物硅技术兼容。所制造的纳米管薄膜将用于构建超级电容器，超级电容器具有多向功率流能力，作为片上电源。双方的合作将导致集成超级电容器作为独立片上电源的开发。它将为超大规模集成系统提供直接的变革性解决方案，并显着减小尺寸和成本。它将提高系统可靠性和运行时间，并刺激各种新应用，从植入设备、远程医疗保健到智能建筑以及无处不在的计算和传感。并行综合教育计划旨在在类似行业的环境中培训学生，并提高他们解决问题的技巧和团队合作技能。教育工作包括招募和保留工程教育领域的学生研究人员、增强两个研究机构（特拉华大学和亚利桑那大学）的工程课程、更广泛的社会教育以及对代表性不足群体成员的宣传。而且，它强调工程教育的多样性，将产生巨大的社会效益。