Micro-Optics Based 3D Microfabrication System

基于微光学的 3D 微加工系统

• 批准号: 0928521
• 负责人: Allen Yi
• 金额: $ 25万
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-01-01 至 2013-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0928521&HistoricalAwards=false
• 关键词: Micro; Optics; Based; 3D; Microfabrication

The research objective of this award is to establish an innovative and affordable process for creating complicated three dimensional microstructures on nonplanar substrates using an optical projection system based on nonconventional micro-optical structures. These micro-optics are precisely fabricated on an arbitrary surface that can be used to project micro and meso scale structures on a pre-defined nonplanar substrate where a layer of photoresist is spin coated. After proper exposure and development, the desired micro or meso pattern will be created on the photoresist layer. The research plan includes two fundamental components: (1) three-dimensional micro-optics fabrication by use of a slow tool servo ultraprecision machining process, (2) design and analysis of a three-dimensional projection lithography system for micro and meso scale structures on nonplanar substrates.If successful, this research will result in a high volume and low cost manufacturing process for true three-dimensional micro and meso scale structures. This process complements conventional photolithography in many applications and the results of the research can be easily converted to producing optical components with micro and meso size features for optoelectronic applications. The major benefits of this research to society will be demonstrated by its impact on several other areas in optical manufacturing, including waveguides, micro and diffractive optics for telecommunication, laser and solar concentrator applications. The results from this research will potentially provide an alternative process for fabricating components with three-dimensional micro size channels, pumps and reservoirs for biomedical and medical applications as well as many other additional consumer products.

该奖项的研究目标是建立一个创新的和负担得起的过程中创建复杂的三维微结构的非平面基板上使用的光学投影系统的基础上非传统的微光学结构。这些微光学器件被精确地制造在任意表面上，其可用于在预定义的非平面衬底上投影微尺度和中尺度结构，在所述预定义的非平面衬底上旋涂光致抗蚀剂层。在适当的曝光和显影之后，将在光致抗蚀剂层上产生期望的微米或介观图案。研究计划包括两个基本组成部分：（1）利用慢速刀具伺服超精密加工工艺制造三维微光学器件，（2）设计和分析用于非平面衬底上的微尺度和介观尺度结构的三维投影光刻系统。如果成功，该研究将导致用于真正的三维微尺度和中尺度结构的大批量和低成本制造工艺。该工艺在许多应用中补充了传统的光刻技术，并且研究结果可以很容易地转换为生产用于光电应用的具有微尺寸和介尺寸特征的光学元件。这项研究对社会的主要好处将通过其对光学制造中的其他几个领域的影响来证明，包括用于电信，激光和太阳能聚光器应用的波导，微光学和衍射光学。这项研究的结果可能会提供一种替代工艺，用于制造具有三维微尺寸通道、泵和储液器的组件，用于生物医学和医疗应用以及许多其他消费产品。