Planning Visit: U.S. - Japan Research on Effective Fast Robust Control of a Precision Planar Motion Stage for Manufacturing and Instruments

计划访问：美国-日本研究制造和仪器精密平面运动平台的有效快速鲁棒控制

• 批准号: 0940662
• 负责人: Sheng-Guo Wang
• 金额: $ 0.99万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-12-01 至 2012-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0940662&HistoricalAwards=false
• 关键词: Planning; Visit; U.S.; Japan; Research

One of the important areas in nanotechnology is nanoscale devices, manufacturing and measurement for advance of science, engineering and economy. Precision stage systems are widely used not only in semiconductor manufacturing systems and precision machine tools, but also in scanning-type measuring instruments such as coordinate measuring machines and surface measuring machines. These systems are required to have submicron to nanometer positioning resolution, but also high speed and long travel range in the presence of unavoidable uncertainties and disturbances, which is a challenge and a well-known difficulty in nanotechnology devices in broad manufacturing and instrumentation areas. Through this research planning visit, Prof. Sheng-Guo Wang from the UNC-Charlotte, together with Japan partner Prof. Wei Gao, Director of Nano-Metrology and Control Laboratory/Research Center at Tohoku University, will investigate precision stage systems, and develop a collaborative advanced practical research project to meet this challenge in nanotechnology by sharing their complementary expertise and research resources. Broader impacts include the international cooperation; training of U.S. graduate students by providing an early career introduction to collaborative international work in advanced areas in two leading industrial countries; and promotion of a mutually beneficial collaborative relationship.

纳米技术的重要领域之一是纳米器件、制造和测量，以促进科学、工程和经济的发展。 精密工作台系统不仅广泛应用于半导体制造系统和精密机床，而且还广泛应用于扫描型测量仪器，例如坐标测量机和表面测量机。这些系统需要具有亚微米到纳米的定位分辨率，而且在存在不可避免的不确定性和干扰的情况下具有高速度和长行程范围，这在广泛的制造和仪器领域中的纳米技术设备中是一个挑战和众所周知的困难。通过这次研究计划访问，北卡罗来纳大学夏洛特分校的王胜国教授将与日本合作伙伴东北大学纳米计量与控制实验室/研究中心主任高伟教授一起研究精密工作台系统，并通过分享互补的专业知识和研究资源，开发一个合作的先进实用研究项目，以应对纳米技术的这一挑战。更广泛的影响包括国际合作;通过在两个主要工业国家的先进领域提供早期职业介绍来培训美国研究生;促进互利的合作关系。