A Multidisciplinary Introduction to Microfabrication

微细加工是制造尺寸小于或等于1微米的微型结构的过程，是许多科学和工程分支的关键领域。由于这一领域的重要性与日俱增，因此需要受过微细加工教育的工程师和科学家。这项技术是现代工程和科学的基础，从学生的本科生涯开始就对他们进行这方面的教育是很重要的。在物理设施上进行了大量投资，现在的挑战是将这一主题纳入课程。这个项目通过几个学科(工程、化学和物理)的大一新生课堂上的讲座、演示甚至实验来介绍微细加工技术。来自几个系的初级课程将微制造模块整合到课程中。在学生的最后一年，有机会参加一门多学科的微细加工课程，包括对洁净室理论和实践的完整介绍。对项目的每个级别进行评估，评估结果被用来随着时间的推移不断改进课程，并衡量是否成功地吸引学生进入该领域。这种多学科的方法表明，微制造建立在许多学科的基础上，对大多数现代技术至关重要，包括许多电气、机械和化学设备等。最终，这将导致毕业的工程师和科学家谁知道微制造，并了解它如何适应现代科学，工程和技术。

Microfabrication, the process of fabrication of miniature structures with dimensions of 1micrometer or less, is a critical area to many branches of science and engineering. Because of the growing importance of this area, there is a need for engineers and scientists educated in microfabrication. This technology is fundamental to modern engineering and science, and it is important to educate students in this area from the beginning of their undergraduate career. A substantial investment in the physical facilities was made and now the challenge is to integrate this topic into the curriculum. This project introduces microfabrication technology through lectures, demonstrations and even experiments in freshman classes across several disciplines (Engineering, Chemistry and Physics). Junior level courses from several departments integrate a microfabrication module into the curriculum. In the students' senior year there is an opportunity to take a multidisciplinary microfabrication capstone course, including a complete introduction to clean room theory and practice. Assessment is done for each level of the project, and assessment results are used to continuously improve the course over time and gauge success in attracting students into this area. This multidisciplinary approach demonstrates that microfabrication is based on many disciplines and vital to most modern technologies, including many electrical, mechanical, and chemical devices, and others. Ultimately, this will result in graduating engineers and scientists who know about microfabrication and understand how it fits in with modern science, engineering and technology.