SBIR Phase I: Batch Fabrication of High Aspect Ratio Metallic AFM Probes

SBIR 第一阶段：高深宽比金属 AFM 探针的批量制造

• 批准号: 0944435
• 负责人: Mehdi Yazdanpanah
• 金额: --
• 依托单位: NaugaNeedles LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0944435&HistoricalAwards=false
• 关键词: SBIR; Phase; Batch; Fabrication; Aspect

This Small Business Innovation Research Phase I project is to demonstrate the feasibility of batch fabricating high-aspect ratio atomic force microscopy (AFM) probes. These probes have excellent mechanical and electrical properties and are customizable to a wide range of applications and substrates. Currently each probe is individually fabricated by dipping a silver-coated probe into melted gallium at room temperature, resulting in the self-assembly of a long, constant-diameter metal nanoneedle on the probe tip. Current production throughput is only five probes per hour. Because of their unique form and function there is a growing demand for these probes which can only be met if they are fabricated in parallel. In Phase I, a batch process will be developed, with the goal of moderate yield (25%) over a 1 cm square area. One innovative aspect of the project is the use of a gallium coated substrate that has an elastomeric underlayer to provide a degree of self-alignment that ensures intimate contact of the thick gallium film layer with surfaces that are not perfectly flat. The extension of this concept - in future studies - to the patterning of arrays of freestanding nanoneedles over curved and multilevel substrates appears reasonable. Based on the attainment of adequate yields in Phase I, Phase II will focus on the development of a semi-automated tool for wafer-scale growth of probes. The broader impact/commercial potential of this project is a dramatically increased commercial viability of a new kind of specialized AFM probe. The total market for AFM probes is $385 million, of which up to $100 million is addressable, if such probes can be fabricated in larger quantities. Since the launch of this technology in late 2008, customer feedback has been overwhelmingly positive. Current customers of these probes have made it clear that this new probe technology represents an enabling tool which will help advance and accelerate the pace of research and discovery in areas including nanomanipulation, biophysical probing, nanomechanics, nanoelectronics and metrology. The long range economic and societal impact will be a new manufactured product which will help to maintain U.S. leadership in nanotechnology and create high-paying technical jobs for scientists and engineers in Kentucky, a state where such opportunities have traditionally been extremely limited.

这个小企业创新研究第一阶段项目是为了证明批量制造高纵横比原子力显微镜（AFM）探针的可行性。 这些探头具有出色的机械和电气性能，可根据各种应用和基底进行定制。 目前，每个探针都是通过在室温下将银涂层探针浸入熔融镓中来单独制造的，从而在探针尖端上自组装出长的、直径恒定的金属纳米针。 目前的生产吞吐量仅为每小时5个探针。 由于其独特的形式和功能，对这些探头的需求不断增长，只有并行制造才能满足这些需求。 在第一阶段，将开发一个批处理过程，目标是在1平方厘米的面积上实现中等产率（25%）。 该项目的一个创新方面是使用具有弹性体底层的镓涂覆衬底，以提供一定程度的自对准，确保厚镓膜层与不完全平坦的表面紧密接触。 这一概念的延伸-在未来的研究中-在弯曲和多层基板上的独立纳米针阵列的图案化似乎是合理的。在第一阶段获得足够产量的基础上，第二阶段将专注于开发用于探针晶圆级生长的半自动化工具。该项目更广泛的影响/商业潜力是一种新型专用AFM探针的商业可行性大大提高。 AFM探针的总市场为3.85亿美元，其中高达1亿美元是可寻址的，如果这种探针可以大量制造。 自2008年底推出这项技术以来，客户的反馈非常积极。 这些探针的当前客户已经明确表示，这种新的探针技术代表了一种使能工具，将有助于推进和加快纳米操纵、生物物理探测、纳米力学、纳米电子学和计量学等领域的研究和发现步伐。 长期的经济和社会影响将是一种新的制造产品，这将有助于保持美国在纳米技术方面的领导地位，并为肯塔基州的科学家和工程师创造高薪的技术工作，该州的这种机会传统上非常有限。