SBIR Phase II: Batch Fabrication of High Aspect Ratio Metallic AFM Probes

SBIR 第二阶段：高深宽比金属 AFM 探针的批量制造

• 批准号: 1058576
• 负责人: Mehdi Yazdanpanah
• 金额: $ 50万
• 依托单位: NaugaNeedles LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-02-01 至 2014-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1058576&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Batch; Fabrication

This Small Business Innovation Research (SBIR) Phase II project aims to develop a low-cost manufacturing process to produce conductive and high-aspect-ratio probes for atomic force microscopy (AFM). A new fabrication tool with high-precision alignment and in-situ process monitoring sensors will be designed and constructed. The probes (so-called NeedleProbes) will be fabricated in a batch process that can pattern an entire wafer of conventional AFM probes with freestanding metal alloy nanowire tips. The broader/commercial impacts of this project will be the potential to provide affordable, conductive and high-aspect-ratio AFM probes that would be well suited in biology for cell scanning and probing, and materials science for imaging of ultra-high-aspect-ratio structures, and electronic measurement of nanostructures. The current fabrication method of AFM probes is a serial process that produces approximately five probes per hour. The advancement in this project toward batch fabrication is expected to extend far beyond the current fabrication method and result in a price reduction of the probes by a factor of 5.

该小型企业创新研究（SBIR）第二阶段项目旨在开发一种低成本制造工艺，以生产用于原子力显微镜（AFM）的导电和高纵横比探针。 将设计和建造一种具有高精度对准和原位工艺监测传感器的新制造工具。探针（所谓的NeedleProbes）将在一个批处理过程中制造，可以图案化整个晶圆的传统AFM探针与独立的金属合金纳米线尖端。 该项目的更广泛/商业影响将是提供负担得起的、导电的和高纵横比的AFM探针的潜力，这些探针将非常适合于生物学中的细胞扫描和探测，以及用于超高纵横比结构成像的材料科学，以及纳米结构的电子测量。 目前AFM探针的制造方法是每小时生产大约5个探针的串行过程。该项目向批量制造的进展预计将远远超出目前的制造方法，并导致探头价格降低5倍。