CAREER: A Hybrid Approach for Flexible Nanomanufacturing - Maskless Plasmonic Nano-Lithography

职业：灵活纳米制造的混合方法 - 无掩模等离子体纳米光刻

• 批准号: 0955195
• 负责人: Cheng Sun
• 金额: $ 40万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-03-01 至 2015-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0955195&HistoricalAwards=false
• 关键词: CAREER; Hybrid; Approach; Flexible; Nanomanufacturing

The research objective of this Faculty Early Career Development (CAREER) project is to develop a new maskless optical nano-fabrication technology with highly desirable process scalability and flexibility. The underlying process physics and chemistry will be studied by a combination of multiphysics-based modeling and experimental characterizations. A range of novel nano-devices for high efficiency energy harvesting and scalable bio-sensor array will be explored. The education objective of this CAREER award is to create education pipeline that prepares young researchers with strong fundamentals, cutting edge technological skills, and most importantly, innovative ideas to meet the demand for advancing nanoscale science and engineering. The approaches include 1) establishing a new education curriculum in Nanomanufacturing through the infusion of research discoveries; 2) inseminating knowledge of the advancements in nanotechnology to the under-represented population at Chicago Public School District; and 3) through close interaction with industrial partners, preparing the students with full prospective of nano-manufacturing and nano-metrology in industry.If successful, the Maskless Plasmonic Nanolithography technology will pave the way for future development of a variety of nano-scale devices and system with ultimate performance, such as high speed computation and signal process, broadband communication, disease diagnostics for health care, and detection and identification of biological and chemical weapons for homeland security. This work will also create integrated research and education program of graduate, undergraduate, and high-school students at Northwestern University with emphasis in reaching out to the underrepresented groups.

该学院早期职业发展(CAREAGE)项目的研究目标是开发一种新的无掩膜光学纳米制造技术，具有非常理想的工艺可扩展性和灵活性。潜在的过程物理和化学将通过基于多物理的建模和实验表征相结合的方式进行研究。将探索一系列用于高效能量收集和可扩展生物传感器阵列的新型纳米器件。这一职业奖项的教育目标是创建教育渠道，培养具有坚实基础、尖端技术技能以及最重要的创新想法的年轻研究人员，以满足不断发展的纳米科学和工程的需求。这些方法包括1)通过灌输研究成果建立新的纳米制造教育课程；2)在芝加哥公立学区向未被充分代表的人群灌输纳米技术进步的知识；3)通过与工业伙伴的密切互动，使学生对纳米制造和纳米计量学有全面的前景。如果成功，无面具等离子纳米光刻技术将为未来各种具有终极性能的纳米设备和系统的发展铺平道路，如高速计算和信号处理、宽带通信、用于医疗保健的疾病诊断、以及用于国土安全的生化武器的检测和识别。这项工作还将创建西北大学研究生、本科生和高中生的综合研究和教育计划，重点是接触代表不足的群体。