Magnetic Field Assisted Nanomachining of Ultraprecision Surfaces

超精密表面的磁场辅助纳米加工

• 批准号: 1000380
• 负责人: Hitomi Yamaguchi Greenslet
• 金额: $ 37.42万
• 依托单位: University of Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-05-01 至 2014-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1000380&HistoricalAwards=false
• 关键词: Magnetic; Field; Assisted; Nanomachining; Ultraprecision

The research objective of this project is to determine the nanoscale material deformation mechanisms induced by magnetic field assisted nanomachining, and to computationally model the nanomachining material removal mechanisms. The completion of this objective will enable machining of surfaces with a roughness value less than 1 nanometer for high-aspect-ratio components such as micropores (20 microns in diameter, 200-250 microns in depth) fabricated by ion or X-ray lithographies. The research approach consists of three tasks. Task 1 is to understand the nanoscale material deformation mechanisms by free abrasive machining, which will drive the development of a model of the material removal mechanism and ferrous particle mixed slurry motion in an alternating magnetic field. Task 2 includes experiments designed to reveal the ferrous particle mixed slurry behavior and abrasive cutting motion in simulated finishing conditions. The results obtained from Tasks 1 and 2 provide feedback for Task 3: optimization of the surface finishing of micropore wall surfaces in silicon and nickel microfabricated chips.If successful, the outcomes of this research will reveal the physical energy-based surface and sub-surface deformation mechanisms of brittle and ductile materials in the nanometer range and provide a new finishing technology to improve the surface roughness and form accuracy. Moreover, a new design concept for ion and X-ray lithography processes (including magnetic field assisted nanomachining as a post-processing step) will be proposed to achieve desired surface functionality. This new technology will lead to the development of higher value-added next generation microelectromechanical systems and emerging nanoelectromechanical systems used for a variety of equipment from healthcare products to high-resolution astronomical telescopes. The multi-disciplinary research plan will provide a stimulating learning environment for both graduate and undergraduate-level students. The investigators will develop a new mentoring program for underrepresented undergraduates to create relationships that lead to an improved support network that better engages the students in the university engineering experience and enhances their long-term retention in engineering careers.

本计画的研究目的是探讨磁场辅助奈米加工所产生的奈米材料变形机制，并建立奈米加工材料移除机制的计算模型。这一目标的完成将使加工表面的粗糙度值小于1纳米的高纵横比组件，如微孔（直径20微米，200-250微米的深度）制造的离子或X射线光刻。研究方法包括三个任务。任务1是了解纳米材料的变形机制，通过自由磨料加工，这将推动一个模型的材料去除机制和铁粒子混合浆料运动在交变磁场的发展。任务2包括旨在揭示铁颗粒混合浆料行为和磨料切削运动在模拟精加工条件下的实验。任务1和任务2的研究结果为任务3：硅和镍微加工芯片内壁表面光整优化提供了反馈，如果获得成功，本研究的成果将揭示纳米级脆性和韧性材料基于物理能的表面和亚表面变形机制，并为改善表面粗糙度和形状精度提供一种新的光整技术。此外，离子和X射线光刻工艺（包括磁场辅助纳米加工作为后处理步骤）的新设计概念将被提出，以实现所需的表面功能。这项新技术将导致开发更高附加值的下一代微机电系统和新兴的纳米机电系统，用于从医疗保健产品到高分辨率天文望远镜的各种设备。多学科研究计划将为研究生和本科生提供一个激励性的学习环境。研究人员将为代表性不足的本科生开发一个新的指导计划，以建立关系，从而改善支持网络，更好地让学生参与大学工程经验，并提高他们在工程职业生涯中的长期保留。