Magnetic Field Assisted Nanomachining of Ultraprecision Surfaces

本课题的研究目标是确定磁场辅助纳米加工引起的纳米材料变形机理，并对纳米加工材料去除机理进行数值模拟。这一目标的完成将使加工粗糙度小于1纳米的高纵横比部件的表面成为可能，例如通过离子或X射线光刻制造的微孔(直径20微米，深度200-250微米)。研究方法包括三个方面的任务。第一个任务是了解自由磨料加工的纳米材料变形机理，这将推动材料去除机理和铁粉混合浆料在交变磁场中运动的模型的建立。任务2包括旨在揭示模拟精加工条件下混合磨料的行为和磨料切割运动的实验。任务1和任务2的结果为任务3：优化硅和镍微加工芯片微孔壁表面的表面精加工提供了反馈。如果成功，本研究的结果将揭示脆性和延性材料在纳米范围内基于物理能量的表面和亚表面变形机理，并为改善表面粗糙度和成形精度提供一种新的精加工技术。此外，将提出一种新的离子和X射线光刻工艺(包括磁场辅助纳米机械加工作为后处理步骤)的设计概念，以实现所需的表面功能。这项新技术将导致开发附加值更高的下一代微电子机械系统和新兴的纳米机电系统，用于从医疗保健产品到高分辨率天文望远镜的各种设备。多学科研究计划将为研究生和本科生提供一个激励的学习环境。调查人员将为未被充分代表的本科生开发一项新的指导计划，以建立一种关系，从而改善支持网络，使学生更好地参与大学工程经验，并增强他们在工程职业生涯中的长期留存。

The research objective of this project is to determine the nanoscale material deformation mechanisms induced by magnetic field assisted nanomachining, and to computationally model the nanomachining material removal mechanisms. The completion of this objective will enable machining of surfaces with a roughness value less than 1 nanometer for high-aspect-ratio components such as micropores (20 microns in diameter, 200-250 microns in depth) fabricated by ion or X-ray lithographies. The research approach consists of three tasks. Task 1 is to understand the nanoscale material deformation mechanisms by free abrasive machining, which will drive the development of a model of the material removal mechanism and ferrous particle mixed slurry motion in an alternating magnetic field. Task 2 includes experiments designed to reveal the ferrous particle mixed slurry behavior and abrasive cutting motion in simulated finishing conditions. The results obtained from Tasks 1 and 2 provide feedback for Task 3: optimization of the surface finishing of micropore wall surfaces in silicon and nickel microfabricated chips.If successful, the outcomes of this research will reveal the physical energy-based surface and sub-surface deformation mechanisms of brittle and ductile materials in the nanometer range and provide a new finishing technology to improve the surface roughness and form accuracy. Moreover, a new design concept for ion and X-ray lithography processes (including magnetic field assisted nanomachining as a post-processing step) will be proposed to achieve desired surface functionality. This new technology will lead to the development of higher value-added next generation microelectromechanical systems and emerging nanoelectromechanical systems used for a variety of equipment from healthcare products to high-resolution astronomical telescopes. The multi-disciplinary research plan will provide a stimulating learning environment for both graduate and undergraduate-level students. The investigators will develop a new mentoring program for underrepresented undergraduates to create relationships that lead to an improved support network that better engages the students in the university engineering experience and enhances their long-term retention in engineering careers.