Nanomanufacturing Process and Applications Based on Dynamic Nano-Inscribing

基于动态纳米刻划的纳米制造工艺及应用

• 批准号: 1000425
• 负责人: L. Jay Guo
• 金额: $ 28万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2013-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1000425&HistoricalAwards=false
• 关键词: Nanomanufacturing; Process; Applications; Based; Dynamic

The research objective of this project is to investigate new nanofabrication techniques. The increasing demands for nanoscale structures in photonics, lighting, solar cells and bio-industries have stimulated many emerging technologies for nanoscale patterning. However most of the techniques cannot offer sufficient throughput and present high cost for these large area applications. This project is to investigate new nanofabrication techniques for directly creating continuous micro- to nano- patterns in a variety of metal or polymer materials with feature size down to sub-50 nm. The first one is termed dynamic nano-inscribing performed at high speed at ambient environment or with a very brief heating time on the order of tens microseconds, which can minimize potential damage to thermo-sensitive materials. The second technique is based on a recent finding of generation of periodic structures from nano- to microscale on a thin metal film coated polymer layer when inscribed by a flat cleaved edge. The research will develop theoretical understanding of the effects and explore applications of these techniques in the area of optoelectronics and nanophotonics.These techniques will aim at an unprecedented speed for nanopatterning. This research will be enhanced by the integration of the education and outreach component which includes the creation of a multidisciplinary (materials science, mechanical engineering, optical science, electrical engineering) scientific learning environment for students at a variety of levels and from several underrepresented groups (women, African-Americans, etc); and incorporation of research results into a course on nanofabrication. Of particular importance is the potential for the proposed technology to have commercial impact in the future.

该项目的研究目标是探索新的纳米加工技术。光子学、照明、太阳能电池和生物工业对纳米结构日益增长的需求刺激了许多新兴的纳米图形技术。然而，大多数技术不能提供足够的吞吐量和高成本，这些大面积应用。该项目旨在研究新的纳米加工技术，以直接在各种金属或聚合物材料中创建连续的微纳米图案，其特征尺寸可低至50纳米以下。第一种是动态纳米刻字，在常温环境下高速刻字或在几十微秒左右的极短加热时间刻字，可以最大限度地减少对热敏材料的潜在损伤。第二种技术是基于最近的一项发现，当被平面切割边缘雕刻时，在薄金属薄膜涂覆的聚合物层上产生从纳米到微尺度的周期结构。该研究将发展对这些效应的理论认识，并探索这些技术在光电子学和纳米光子学领域的应用。这些技术将以前所未有的纳米图案速度为目标。这项研究将通过教育和外联部分的整合而得到加强，其中包括为不同层次的学生和来自几个代表性不足的群体（妇女、非洲裔美国人等）的学生创造一个多学科（材料科学、机械工程、光学科学、电气工程）的科学学习环境；并将研究成果纳入纳米制造课程。特别重要的是，拟议的技术在未来有可能产生商业影响。