NSEC: Center for Hierarchical Manufacturing

NSEC：分层制造中心

• 批准号: 1025020
• 负责人: James Watkins
• 金额: $ 2000万
• 依托单位: University of Massachusetts Amherst
• 依托单位国家: 美国
• 项目类别: Cooperative Agreement
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-04-01 至 2018-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1025020&HistoricalAwards=false
• 关键词: NSEC; Center; Hierarchical; Manufacturing

The Center for Hierarchical Manufacturing (CHM) is a leading research and education center for the development of precision and cost efficient process platforms and tools for the manufacturing of next generation, nanotechnology-enabled devices for electronics, energy conversion, resource conservation and human health. The Center's approach involves the integration of components and systems across multiple length scales using novel nanofabrication processes for sub-30 nm elements based on directed self-assembly, additive-driven assembly, nanoimprint lithography, and conformal deposition at the nanoscale in combination with either Si wafer-based technologies or high-rate roll-to-roll based production tools. The CHM effort is made comprehensive by research on device design, modeling and prototype testing in functional architectures that take advantage of the specific hierarchical nanomanufacturing capabilities developed by the Center. The research structure consists of three Technical Research Groups (TRGs) and system-level test beds in which the key science, engineering and process barriers to the manufacturing of device nanostructures using the CHM platform tools are identified, systematically addressed and resolved. TRG 1, Nanoscale Materials and Processes, addresses the materials systems and processes necessary for high reliability nanofabrication and supports fundamental research on the CHM's core technologies. TRG 2, Nanoscale Devices, Systems, and Metrology, supports fundamental studies in magnetics, photonics and device design to generate proof-of-concept prototypes that can be assembled using advances from TRG 1 and the CHM's process platforms. TRG 3, Sensors and Environmental Monitoring, is creating new systems for on-chip separations, diagnostics and environmental monitoring. This includes new strategies for tracking nanomaterials in the environment and assessing their toxicity and biodistribution in plant and animal species. The test beds are the heart of process and platform development where promising concepts transition from laboratory results into reliable, rapid, high-yield and transferable methodologies. CHM test beds include a unique a roll-to-roll process facility for self-assembled materials and devices, including custom coating lines for nanohybrid materials and roll-to-roll nanoimprint tools. Test bed demonstration projects include polymer batteries, flexible photovoltaics and nanoporous films for separations. The CHM's fundamental science and test bed efforts incorporate faculty and research professionals at UMass Amherst, Binghamton University, MIT, The University of Michigan, Mount Holyoke College, NIST, The University of Puerto Rico, and Rice University and benefit from collaborations with leading groups in Europe and Asia. In terms of broader impacts, the implementation of efficient nanomanufacturing strategies that are compatible with Si wafer processing or high-volume roll-to-roll processing will enable the production of high performance computing, memory, sensing and photonic/optically active media and devices as well as nano-enabled products in energy conversion, organic electronics and displays at acceptable cost. Such advances will help to transform our nation?s substantial investment in basic research into products that provide substantial social and economic benefits. In addition, the CHM is the administrative hub of the National Nanomanufacturing Network (NNN). The NNN is a catalyst for U.S. nanomanufacturing-based economic development and research collaboration. It comprises a network of manufacturing facilities and expertise, a dynamic web-based information resource, and a pathway for university-industry-government partnerships. The NNN efforts include InterNano, a freely accessible digital library and information resource on nanomanufacturing. The NNN coordinates, hosts and distributes the outcome of workshops on emerging areas in nanotechnology research, implementation and societal implications. The CHM further serves a broad educational audience, including those in K-12, community college, undergraduate and graduate schools, and the public. The CHM's strategy focuses on training K-12 teachers in nanoscience curriculum, developing re-purposeable educational materials for various audiences and levels, piloting and disseminating nanomanufacturing and nanoscience educational content to community colleges, and enhancing undergraduate and graduate training in nanotechnology. The CHM champions the principle of diverse participation in all of its activities: research, education, outreach and management. A Diversity Team coordinates CHM-wide team efforts to ensure efficient implementation of the Center?s Diversity Strategic Plan.

分层制造中心 (CHM) 是一家领先的研究和教育中心，致力于开发精密且具有成本效益的工艺平台和工具，用于制造用于电子、能源转换、资源节约和人类健康的下一代纳米技术设备。 该中心的方法涉及使用基于定向自组装、增材驱动组装、纳米压印光刻和纳米级保形沉积的30纳米以下元件的新型纳米制造工艺来集成跨多个长度尺度的组件和系统，并结合基于硅晶圆的技术或基于高速卷对卷的生产工具。 CHM 的工作是通过对功能架构中的设备设计、建模和原型测试进行研究，利用该中心开发的特定分层纳米制造能力。 该研究结构由三个技术研究组 (TRG) 和系统级测试台组成，其中识别、系统地解决和解决使用 CHM 平台工具制造器件纳米结构的关键科学、工程和工艺障碍。 TRG 1，纳米级材料和工艺，解决高可靠性纳米制造所需的材料系统和工艺，并支持 CHM 核心技术的基础研究。 TRG 2（纳米级器件、系统和计量）支持磁学、光子学和器件设计方面的基础研究，以生成概念验证原型，这些原型可以使用 TRG 1 和 CHM 工艺平台的先进技术进行组装。 TRG 3（传感器和环境监测）正在创建用于片上分离、诊断和环境监测的新系统。这包括跟踪环境中的纳米材料并评估其在植物和动物物种中的毒性和生物分布的新策略。测试台是流程和平台开发的核心，有前途的概念从实验室结果转变为可靠、快速、高产和可转移的方法。 CHM 测试台包括用于自组装材料和设备的独特卷对卷工艺设施，包括用于纳米混合材料的定制涂层线和卷对卷纳米压印工具。试验台示范项目包括聚合物电池、柔性光伏电池和用于分离的纳米多孔薄膜。 CHM 的基础科学和试验台工作由麻省大学阿默斯特分校、宾厄姆顿大学、麻省理工学院、密歇根大学、曼荷莲学院、NIST、波多黎各大学和莱斯大学的教师和研究专业人员组成，并受益于与欧洲和亚洲领先团体的合作。就更广泛的影响而言，实施与硅晶圆加工或大批量卷对卷加工兼容的高效纳米制造策略将能够以可接受的成本生产高性能计算、存储器、传感和光子/光学活性介质和设备，以及能源转换、有机电子和显示器领域的纳米产品。 这些进步将有助于将我们国家对基础研究的大量投资转化为可带来巨大社会和经济效益的产品。 此外，CHM 是国家纳米制造网络 (NNN) 的管理中心。 NNN 是美国纳米制造经济发展和研究合作的催化剂。 它由制造设施和专业知识组成的网络、基于网络的动态信息资源以及大学-行业-政府合作伙伴关系的途径组成。 NNN 的努力包括 InterNano，这是一个可免费访问的纳米制造数字图书馆和信息资源。 NNN 协调、主办和分发有关纳米技术研究、实施和社会影响新兴领域的研讨会成果。 CHM 还为广泛的教育受众提供服务，包括 K-12、社区学院、本科生和研究生院以及公众。 CHM 的战略重点是培训 K-12 教师纳米科学课程、为不同受众和水平开发可重复利用的教育材料、向社区大学试点和传播纳米制造和纳米科学教育内容，以及加强纳米技术方面的本科生和研究生培训。 CHM 倡导多元化参与其所有活动的原则：研究、教育、推广和管理。 多元化团队负责协调整个 CHM 团队的工作，以确保中心多元化战略计划的有效实施。