Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing

摘要：本研究的目的是开发一种高灵敏度和选择性的基于阵列的液相化学传感系统，该系统由单个功能化的微机械谐振器在平面模式下振动组成。将对棱柱悬臂、锤头和蹦床装置进行研究，选择最有前途的进行详细设计和制造。将探索一种新的系统级方法，通过利用单个聚合物涂层传感器元件的温度依赖性来解决选择性挑战。这将允许使用受分析物吸附动力学影响的信号瞬态，从而为分析物定量提供额外的信息。基于阵列的设备将在一个集成的流体包中实现，以方便操作。智力上的优点在于开发了一种基于阵列的液相化学传感系统，该系统具有更好的分辨能力。理论模型和选择性阵列系统方法将最终指导设计在任何环境下工作的更高效的微谐振传感器。更广泛的影响源于改进的基于微谐振器的阵列传感平台的可用性，该平台用于液相（生物）化学传感，并作为一种教育工具，将最先进的微制造、传感器技术和系统工程与（生物）化学和医学应用相结合。所提出的微谐振器非常适合作为研究生和本科生的教育工具以及K-12外展计划。他们也将影响传感系统技术，通过他们改进的分析物辨别。利用涂层设备的附加功能，而不是开发新的传感膜，可能是真正的变革，使新的传感系统的开发应用范围从环境监测到医疗诊断。

Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing ABSTRACT:The objective of this research is to develop a highly sensitive and selective liquid-phase, array-based chemical-sensing system of individually functionalized, micromachined resonators vibrating in an in-plane mode. Prismatic cantilevers, hammerheads and trampoline devices will be investigated, with the most promising being selected for detailed design and fabrication. A novel system-level approach will be explored to address the selectivity challenge by utilizing the temperature-dependence of individual polymer-coated sensor elements. This will allow the use of signal transients that are affected by the sorption kinetics of analytes into polymers, thus providing additional information for analyte quantification. The array-based device will be implemented in an integrated fluidics package for ease of operation. The intellectual merit lies in the development of a liquid-phase, array-based chemical-sensing system having improved discriminatory power. The theoretical models and selective array system approach will ultimately guide the design of more efficient microresonant sensors operating in any environment.The broader impact stems from the availability of the improved microresonator-based array sensing platform for liquid-phase (bio)chemical sensing and as an educational tool coupling state-of-the-art microfabrication, sensor technology and systems engineering with (bio)chemical and medical applications. The proposed microresonators are ideally suited as an educational tool for graduate and undergraduate students and for K-12 outreach programs. They will also impact sensing system technology through their improved analyte discrimination. Utilizing additional features of coated devices rather than developing new sensing films could be truly transformative, enabling the development of new sensing systems for applications ranging from environmental monitoring to medical diagnosis.