Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing

合作研究：集成温度调制的微机械面内谐振器阵列：液相化学传感的系统方法摘要：本研究的目的是开发一种高灵敏度和选择性的液相，基于阵列的化学传感系统的单独功能化，微机械谐振器在面内模式振动。将对棱镜杠杆、锤头和蹦床装置进行研究，并选择最有前途的装置进行详细设计和制造。一种新的系统级的方法将被探索，以解决选择性的挑战，利用温度依赖性的个别聚合物涂层的传感器元件。这将允许使用受分析物进入聚合物的吸附动力学影响的信号瞬变，从而为分析物定量提供额外的信息。基于阵列的设备将在集成射流包中实现，以便于操作。 智力的优点在于液相，阵列为基础的化学传感系统，具有改善的歧视的权力的发展。理论模型和选择性阵列系统方法将最终指导设计更有效的微谐振传感器在任何环境下运行，更广泛的影响源于改进的微谐振器为基础的阵列传感平台的液相（生物）化学传感和教育工具耦合国家的最先进的微细加工，传感器技术和系统工程与（生物）化学和医学应用的可用性。所提出的微谐振器非常适合作为研究生和本科生以及K-12推广计划的教育工具。它们还将通过其改进的分析物识别来影响传感系统技术。利用涂层设备的额外功能而不是开发新的传感膜可能真正具有变革性，从而能够开发新的传感系统，用于从环境监测到医疗诊断的应用。

Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing ABSTRACT:The objective of this research is to develop a highly sensitive and selective liquid-phase, array-based chemical-sensing system of individually functionalized, micromachined resonators vibrating in an in-plane mode. Prismatic cantilevers, hammerheads and trampoline devices will be investigated, with the most promising being selected for detailed design and fabrication. A novel system-level approach will be explored to address the selectivity challenge by utilizing the temperature-dependence of individual polymer-coated sensor elements. This will allow the use of signal transients that are affected by the sorption kinetics of analytes into polymers, thus providing additional information for analyte quantification. The array-based device will be implemented in an integrated fluidics package for ease of operation. The intellectual merit lies in the development of a liquid-phase, array-based chemical-sensing system having improved discriminatory power. The theoretical models and selective array system approach will ultimately guide the design of more efficient microresonant sensors operating in any environment.The broader impact stems from the availability of the improved microresonator-based array sensing platform for liquid-phase (bio)chemical sensing and as an educational tool coupling state-of-the-art microfabrication, sensor technology and systems engineering with (bio)chemical and medical applications. The proposed microresonators are ideally suited as an educational tool for graduate and undergraduate students and for K-12 outreach programs. They will also impact sensing system technology through their improved analyte discrimination. Utilizing additional features of coated devices rather than developing new sensing films could be truly transformative, enabling the development of new sensing systems for applications ranging from environmental monitoring to medical diagnosis.