Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing

合作研究：集成温度调制的微机械共振器阵列：液相化学传感的系统方法摘要：这项研究的目标是开发一种高灵敏度和选择性的基于阵列的液体化学传感系统，该系统由单独功能化的微机械谐振器以平面模式振动。将对棱柱形悬臂、锤头和蹦床装置进行研究，选择最有希望的进行详细设计和制造。将探索一种新的系统级方法，通过利用单个聚合物涂层传感器元件的温度依赖性来解决选择性挑战。这将允许使用受分析物到聚合物中的吸附动力学影响的信号瞬变，从而为分析物定量提供额外的信息。基于阵列的设备将在集成的流体组件中实施，以便于操作。智能的优点在于开发了一种基于阵列的液相化学传感系统，该系统具有更好的辨别能力。理论模型和选择性阵列系统方法将最终指导设计在任何环境下运行的更高效的微谐振式传感器。更广泛的影响来自于基于改进的微谐振器的阵列传感平台的可用性，以及作为一种将最先进的微制造、传感器技术和系统工程与(生物)化学和医疗应用相结合的教育工具。建议的微谐振器非常适合作为研究生和本科生以及K-12推广计划的教育工具。他们还将通过改进分析物辨别能力来影响传感系统技术。利用涂层设备的更多特征而不是开发新的传感薄膜可能真正具有变革性，使新的传感系统的开发能够应用于从环境监测到医疗诊断的各种应用。

Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing ABSTRACT:The objective of this research is to develop a highly sensitive and selective liquid-phase, array-based chemical-sensing system of individually functionalized, micromachined resonators vibrating in an in-plane mode. Prismatic cantilevers, hammerheads and trampoline devices will be investigated, with the most promising being selected for detailed design and fabrication. A novel system-level approach will be explored to address the selectivity challenge by utilizing the temperature-dependence of individual polymer-coated sensor elements. This will allow the use of signal transients that are affected by the sorption kinetics of analytes into polymers, thus providing additional information for analyte quantification. The array-based device will be implemented in an integrated fluidics package for ease of operation. The intellectual merit lies in the development of a liquid-phase, array-based chemical-sensing system having improved discriminatory power. The theoretical models and selective array system approach will ultimately guide the design of more efficient microresonant sensors operating in any environment.The broader impact stems from the availability of the improved microresonator-based array sensing platform for liquid-phase (bio)chemical sensing and as an educational tool coupling state-of-the-art microfabrication, sensor technology and systems engineering with (bio)chemical and medical applications. The proposed microresonators are ideally suited as an educational tool for graduate and undergraduate students and for K-12 outreach programs. They will also impact sensing system technology through their improved analyte discrimination. Utilizing additional features of coated devices rather than developing new sensing films could be truly transformative, enabling the development of new sensing systems for applications ranging from environmental monitoring to medical diagnosis.