GOALI/Collaborative Research: Deciphering the Mechanisms of Wear to Enable High Performance Tip-Based Nanomanufacturing

基于针尖的纳米制造（TBN）是一个有前途的和可扩展的平台，用于制造高精度的纳米结构。所有TBN工艺都取决于纳米级原子力显微镜（AFM）针尖的可用性，这些针尖可以在TBN工艺的长期和恶劣条件下生存，而不会在成分或几何形状上发生实质性变化。然而，缺乏对纳米级磨损的科学理解，特别是在TBN工艺扩大规模时遇到的极端条件下。该赠款提供资金，以严格开发纳米级磨损的基础科学，这是实现高性能，高速率TBN工艺的强大探头所需的。综合，跨学科的研究计划包括先进的原子模拟集成连续模型，和创新的实验，包括原位磨损研究结合原子力显微镜与电子显微镜。该研究将侧重于了解由工业合作伙伴Advanced Diamond Technologies（ADT）制造的超纳米晶金刚石（UNCD）AFM探针以及基于硅的传统商业探针的性能。 与其他工业合作者进行商业TBN工艺的互动将被用来选择研究的相关条件，并根据研究结果优化可扩展的TBN工艺和探针的设计。如果成功，这项研究将把广泛的TBN方法从台式原型工艺转变为商业可行的应用。这将通过实现新的方法来实现，以最大限度地减少TBN工艺中的尖端磨损。 对磨损的理解将适用于广泛的TBN方法的可靠探头的设计和制造。试验结果将包括为高性能TBN部署UNCD探头，以及为实现商业上可行的TBN的性能改进建立操作条件。教育和推广活动将导致一个新的短期课程的TBN针对行业观众，研究经验的高中科学教师，和学生的高级培训。

Tip-based nanomanufacturing (TBN) is a promising and scalable platform for fabricating nanostructures en masse with high precision. All TBN processes hinge on the availability of nanoscale atomic force microscope (AFM) tips that can survive the long-lasting and harsh conditions of TBN processes without substantial changes in composition or geometry. However, the scientific understanding of nanoscale wear, particularly under the extreme conditions encountered as TBN processes are scaled up, is lacking. This grant provides funding to rigorously develop the fundamental science of nanoscale wear that is needed to realize robust probes for high-performance, high-rate TBN processes. The integrated, interdisciplinary research plan consists of advanced atomistic simulations integrated with continuum models, and innovative experiments that include in-situ wear studies combining AFM with electron microscopy. The research will focus on understanding the performance of ultrananocrystalline diamond (UNCD) AFM probes manufactured by the industrial partner, Advanced Diamond Technologies (ADT), as well as conventional commercial probes based on silicon. Interactions with additional industrial collaborators pursuing commercial TBN processes will be leveraged to select relevant conditions for the studies, and to optimize the design of scalable TBN processes and probes based on the research findings.If successful, this research will transform a broad range of TBN methods from bench-top prototype processes to commercially-viable applications. This will be achieved by realizing new approaches to minimize tip wear in scaled-up TBN processes. The understanding of wear that is developed will apply to the design and fabrication of reliable probes for a broad range of TBN methods. Tangible outcomes will include the deployment of UNCD probes for high performance TBN, and the establishment of operating conditions for achieving improved performance in commercially-viable TBN. The education and outreach activities will lead to a new short-course on TBN aimed at industry audiences, research experiences for high school science teachers, and the advanced training of students.