Improving Sustainability of Atomic Layer Deposition: a Hierarchical Systems Approach

提高原子层沉积的可持续性：分层系统方法

• 批准号: 1200940
• 负责人: Chris Yuan
• 金额: $ 45.79万
• 依托单位: University of Wisconsin-Milwaukee
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-08-01 至 2016-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1200940&HistoricalAwards=false
• 关键词: Improving; Sustainability; Atomic; Layer; Deposition

This research project is to study and improve the sustainability performance of Atomic Layer Deposition (ALD) through a hierarchical systems approach. ALD is a key enabling nanotechnology that has been adopted in the semiconductor manufacturing industry. Currently ALD is under rapid development for a broad array of industrial applications including solar cells, fuel cells, lithium-ion batteries, medical devices, sensors, etc. However, ALD has significant sustainability issues due to its heavy use of toxic chemicals, potential generation of nano-particle emissions, and intensive use of energy. The goal of this project is to research mathematical models and analytical tools for reducing the environmental impact and economic costs of ALD nano-manufacturing for industrial-scale applications. This project will be carried out in a systematic manner that integrates both mathematical modeling and experimental investigations. Specific research goals of this project are: (1) mathematical modeling and experimental investigations of ALD process emissions (2) thermodynamic flows and energy modeling of ALD nano-manufacturing system (3) sustainable scale-up of ALD nanotechnology for industrial productions. If successful, the models and results developed in this study will allow ALD and associated industries to address the long-term environmental and societal implications of ALD nanotechnology. The models and results can also be used in sustainable management and improvement of similar bottom-up nanotechnologies. The research results of this project will be broadly disseminated through academic journals, professional conferences, and internet media. As a result, this research will improve our understanding of the potential environmental impacts of ALD nano-manufacturing and assist in development of a sustainable infrastructure for ALD productions in various industrial sectors.

该研究项目旨在通过分层系统方法研究和提高原子层沉积（ALD）的可持续性表现。 ALD 是半导体制造行业采用的关键纳米技术。目前，ALD 正在快速发展，其广泛的工业应用包括太阳能电池、燃料电池、锂离子电池、医疗设备、传感器等。然而，由于大量使用有毒化学品、可能产生纳米颗粒排放以及大量使用能源，ALD 存在严重的可持续性问题。该项目的目标是研究数学模型和分析工具，以减少工业规模应用 ALD 纳米制造对环境的影响和经济成本。该项目将以数学建模和实验研究相结合的系统方式进行。该项目的具体研究目标是：（1）ALD过程排放的数学建模和实验研究（2）ALD纳米制造系统的热力学流动和能量建模（3）ALD纳米技术在工业生产中的可持续规模化。如果成功，本研究开发的模型和结果将使 ALD 和相关行业能够解决 ALD 纳米技术的长期环境和社会影响。 该模型和结果还可用于类似自下而上纳米技术的可持续管理和改进。该项目的研究成果将通过学术期刊、专业会议和网络媒体广泛传播。 因此，这项研究将增进我们对 ALD 纳米制造潜在环境影响的了解，并有助于为各个工业部门的 ALD 生产开发可持续的基础设施。