Ultrasonic Vibration Assisted NanoMachining for High-rate Tunable 2D and 3D Nanofabrication

本研究的目的是研究一种低成本、高速、可调谐的纳米加工方法，该方法利用尖锐的悬臂梁尖端，并借助超声波振动。针尖和样品之间的可控超声振动使高效率地在一次加工中可调谐地制造出大尺寸范围的特征。这项研究融合了工艺创新和工艺建模(用于分析纳米加工过程的材料、几何和工艺参数的经验模型)，以创建一种用于高速纳米加工的新型制造工艺。这项研究将探索一种高速、高精度的纳米定位阶段，以充分利用超声振动辅助纳米加工过程的高速能力，创建一种新的制造系统，能够高通量地制造2D和3D纳米级特征。如果成功，这项研究成果将为2D和3D纳米结构的制造提供一种低成本、高通量的方法，从而推动新兴的纳米制造产业的发展。考虑到其他纳米制造方法(如电子束光刻、EUV光刻)的成本和高投资，这项研究的结果将为纳米级特征和器件的制造提供一个革命性和高效的框架，并有可能对许多进化产品做出贡献，如纳米电子、太阳能电池、光子学和生物医学器件。此外，这项研究将把纳米技术、纳米制造、机械、过程建模和仪器设备方面的广泛发现整合到一个高速度、高成本效益的纳米制造系统中。同时，计划中的多学科研究型教育计划将把研究成果和学生联系起来？为满足当代工业对纳米技术、纳米制造和仪器仪表的需求而开展的活动。研究成果将通过技术出版物、研讨会、定期和短期课程以及K-12推广计划广泛传播。

The objective of this research is to investigate a low cost, high speed, tunable NanoMachining approach using sharp cantilever tips with the help of ultrasonic vibration. The controllable ultrasonic vibration between the tip and the sample enables tunable fabrication of features across a wide dimensional range in one pass with high efficiency. This research incorporates process innovation and process modeling (empirical models for analysis of the nanomachining process with respect to material, geometric and process parameters) to create a novel manufacturing process for high rate nanofabrication. A high speed, high precision nanopositioning stage will be explored to fully utilize the high rate capabilities of the ultrasonic vibration assisted nanomachining process to create a novel manufacturing system, capable of high-throughput fabrication of 2D and 3D nanoscale features.If successful, the results of this research will advance the emerging nanomanufacturing industry by providing a low-cost, high-throughput method for the fabrication of 2D and 3D nanostructures. Considering the cost and high investment of other nanofabrication approaches (e.g. e-beam lithography, EUV-lithography), the results from this research will provide a transformative and efficient framework for the fabrication of nanoscale features and devices with the potential to contribute to many evolutionary products, such as nano-electronics, solar cells, photonics, and biomedical devices. Moreover, this research will integrate broad discoveries in nanotechnologies, nanofabrication, mechanics, process modeling, and instrumentation into a high rate, cost effective nanomanufacturing system. Meanwhile, the planned multidisciplinary research-based education program will link the research outcomes and students? activities to the needs of contemporary industry for nanotechnology, nanofabrication, and instrumentation. The research results will be broadly disseminated through technical publications, workshops, regular and short courses, and K-12 outreach program.