Study on Ultrasonic 2-axis Vibration Assisted Polishing

超声波二轴振动辅助抛光研究

• 批准号: 22560125
• 负责人: SUZUKI Hirofumi
• 金额: $ 3万
• 依托单位: Chubu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22560125/
• 关键词: 超音波研磨; 砥粒加工; マイクロ非球面金型; 超音波2軸振動; 表面粗さ; 形状精度; 振動解析; 圧電素子; 超音波２軸振動; 非球面金型; ダイヤモンド砥粒; 単一加工痕

Micro glass lenses for digital cameras and blue laser DVD pick-up devices are generally molded by using micro aspheric ceramic molds made of tungsten carbides. These molds are finished by micro polishing using loose abrasives after grinding. Improvement to the accuracy of the molds is necessary, and high numerical aperture (NA) optics with steep angles are required. In order to finish the molds of high NA, an ultrasonic two-axis vibration assisted polishing machine with piezo-electric actuators was proposed and developed. Some micro aspheric molds made of binderless tungsten carbide were polished, and surface roughness of 8 nm Rz was obtained.

用于数码相机和蓝色激光DVD拾取设备的微型玻璃透镜通常使用由碳化钨制成的微型非球面陶瓷模具成型。这些模具在研磨后使用松散的磨料进行微抛光。提高模具的精度是必要的，并要求大数值孔径（NA）的光学陡峭的角度。为了完成高精度模具的加工，提出并研制了一种压电驱动的超声两轴振动辅助抛光机。对无粘结剂碳化钨微非球面模具进行了抛光处理，获得了8 nm Rz的表面粗糙度。

项目成果

Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism

• DOI: 10.4028/www.scientific.net/amr.325.470
• 发表时间: 2011-08
• 期刊: Advanced Materials Research
• 作者: Sze Keat Chee;H. Suzuki;Mutsumi Okada;Takeshi Yano;T. Higuchi;Weimin Lin

Study on precision polishing of micro structured mold -Development of micro polishing system using piezoelectric actuator-incorporated with mechanical transformer-

微结构模具的精密抛光研究-使用压电致动器的微抛光系统的开发-结合机械变压器-

• 发表时间: 2011
• 作者: S.K. Chee;H. Suzuki ;M. Okada,K. Yoshida;W. Lin;T. Yano;T. Higuchi
• 通讯作者: T. Higuchi

変位拡大機構及び研磨装置

位移放大机构及抛光装置

• 发表时间: 2012

低周波振動援用研磨による金型材料の加工特性

低频振动辅助抛光模具材料的加工特性

• 发表时间: 2011
• 作者: T.Itoh;A.Saitoh;A.Kamitani;滝澤雅俊;林偉民,大村元志,藤本正和,呉勇波,山形豊;江龍修;I.Riku;小林直貴,久保田享,林偉民,呉勇波,藤本正和,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文,牧野俊清
• 通讯作者: 小林直貴,久保田享,林偉民,呉勇波,藤本正和,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文,牧野俊清

Polishing Experiments of Micro Aspheric Mold Using Vibration Assisted Polishing Machine

微型非球面模具振动辅助抛光机抛光实验

• 发表时间: 2012
• 作者: S.K.Chee;H.Suzuki;M.Okada;Takeshi Yano;T.Higuchi;W.Lin;郭江,鈴木浩文,森田晋也,山形豊,樋口俊郎
• 通讯作者: 郭江,鈴木浩文,森田晋也,山形豊,樋口俊郎