Development of a New Class of Thermal Transducers Through Phase-Change Materials

该计划的目标是通过成功地将二氧化钒薄膜集成到微电子机械结构中，实现一种新的微驱动技术。为了展示新技术的优势，将开发特定的基于二氧化钒的设备；包括能够施加远远超出当前技术理论限制的可重复作用力的单片集成可编程微执行器，以及微米尺寸的仿生鳍。智能的优点是开发了一种新技术，它将为微驱动创造一种不同的方法，并在该领域建立新的范例。将使用的基本机制依赖于二氧化钒薄膜从固体到固体结构相变过程中发生的巨大应力变化。初步结果表明，所开发的器件将具有更大的应变能密度、更高的可逆性和重复性、更高的开关速度，以及由于二氧化钒相变过程中的强耦合机制增强了多功能性。更广泛的影响是通过将最近观察到的基本现象转化为微执行器的新工作原理来改变热传感器领域，并了解如何在微机器人、外科手术、操纵和能量收集等相关领域最好地利用这项新技术。外展活动包括向来访的大学预科学生进行实验演示，他们将有机会操纵微米大小的物体。该计划将把代表性不足的群体纳入计划中的研究和教育活动。

The objective of this program is to enable a new micro-actuation technology through the successful integration of vanadium dioxide thin films in micro-electro-mechanical structures. To demonstrate the advantages of the new technology, specific vanadium dioxide-based devices will be developed; including monolithically integrated programmable micro-actuators capable of exerting repeatable forces well beyond the theoretical limits of current technologies, and micrometer-sized biomimetic fins. The intellectual merit is the development of a new technology that will create a different approach for micro-actuation and establish new paradigms in the field. The fundamental mechanism that will be used relies on the large stress changes that occur during the solid-to-solid- structural phase transition of vanadium dioxide thin films. Preliminary results show that the devices to be developed will be capable of larger strain energy densities, higher reversibility and repeatability, increased switching speeds, and due to the strongly coupled mechanisms during the phase-change of vanadium dioxide enhanced multifunctionality. The broader impacts are to transform the field of thermal transducers by translating a recently observed fundamental phenomenon into a new operating principle for micro-actuators, and to understand how to make the best use of this new technology in related fields such as micro-robotics, -surgery, - manipulation, and energy harvesting. The outreach activities include experimental demonstrations to visiting pre-college students, who will have the opportunity to manipulate micro meter-sized objects. The program will integrate underrepresented groups in the planned research and educational activities.