CMOS-Compatible Nanomanufactured Optoelectronic Integrated Circuits on Silicon

CMOS 兼容的纳米硅光电集成电路

• 批准号: 1335609
• 负责人: Constance Chang-Hasnain
• 金额: $ 30万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-10-01 至 2016-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1335609&HistoricalAwards=false
• 关键词: CMOS; Compatible; Nanomanufactured; Optoelectronic; Integrated

The overarching goal of this project is to develop manufacturable, monolithic integrated optoelectronic and electronic circuits by integrating III-V compound nanopillar optoelectronic devices onto silicon substrates. The objectives of this research are (1) to control the synthesis of nanostructures on silicon such that they can be placed or seeded by design and scaled for mass production and (2) develop electrically pumped lasers monolithically integrated with silicon photonics and electronics. Using metal-organic chemical vapor deposition synthesis technique, the nanopillar growth mechanism will be fully investigated to achieve precise control of growth sites, density, doping and heterostructure formation. Heterostructures are sandwich layers of different materials. Building upon that, electrically-pumped nanopillar laser with a silicon transparent emission wavelength will be designed, fabricated, and characterized. Furthermore, nanopillar lasers will be integrated onto silicon waveguides with high coupling efficiency for optoelectronic applications. Waveguides are structures that guide light or electromagnetic waves.The development of such optoelectronic integrated circuits will bridge the gap between optoelectronic devices on III-V semiconductor platform and integrated circuits on silicon with a unique manufacturing mechanism. Its success will add novel breakthrough functionalities onto cost-effective silicon wafers with greatly reduced power consumption, size, and weight. One of its transformational impacts on our society could be bringing our personal hand-held devices to a wide spectrum of applications in healthcare, sensing, imaging, and communication. In addition, this project will result in a disruptive technology for nanomaterial manufacturing, developing a major capability that will fundamentally transform the synthesis of lattice-mismatched materials, which are materials whose crystal structures don?t match up. Together with its research activities primarily conducted by graduate students, this project will also offer interdisciplinary opportunities for high school and undergraduate students to gain hands-on experiences in cutting-edge research.

该项目的首要目标是通过将III-V族化合物纳米柱光电器件集成到硅衬底上来开发可制造的单片集成光电和电子电路。本研究的目标是（1）控制硅上纳米结构的合成，使它们可以通过设计放置或播种，并按比例进行大规模生产，（2）开发与硅光子学和电子学单片集成的电泵浦激光器。利用金属有机化学气相沉积合成技术，将充分研究纳米柱的生长机理，以实现生长位置、密度、掺杂和异质结构形成的精确控制。异质结构是不同材料的夹层。在此基础上，将设计、制造和表征具有硅透明发射波长的电泵浦纳米柱激光器。此外，纳米柱激光器将被集成到硅波导上，具有高耦合效率，用于光电应用。波导是引导光或电磁波的结构，这类光电集成电路的发展将以独特的制造机制，弥合III-V族半导体平台上的光电器件与硅上集成电路之间的差距。它的成功将为具有成本效益的硅晶片增加新的突破性功能，大大降低功耗，尺寸和重量。它对我们社会的变革性影响之一可能是将我们的个人手持设备带到医疗保健，传感，成像和通信的广泛应用中。此外，该项目将导致纳米材料制造的颠覆性技术，开发一种主要能力，从根本上改变晶格失配材料的合成，这种材料的晶体结构不匹配。不匹配。连同主要由研究生进行的研究活动，该项目还将为高中和本科生提供跨学科的机会，以获得尖端研究的实践经验。