SBIR Phase II: High Performance MOF-Based Storage and Delivery of Electronic Gases

这个小型企业创新研究（SBIR）第二阶段项目的更广泛的影响/商业潜力是开发一种用于半导体制造的新型危险气体储存和输送系统，该系统将以更低的成本显着促进工人的健康和安全利益。新系统采用了一种新型的超高性能吸收剂，即金属有机框架（MOFs），通过减少有毒气体释放事件，设备损坏和制造设施疏散的机会，将大大减轻环境和公共健康风险。此外，MOF的使用能够增加存储容量，同时提供通风能量的节省，并降低高压机械气缸和低于大气压的碳基存储的泄漏风险。鉴于目前活性炭气瓶的巨大市场份额，更高容量的MOF填充气瓶通过最小化气瓶更换和制造设施停机时间，提供了大幅降低每个晶片生产成本的前景。此外，该技术代表了MOFs的首次大规模商业应用，从而为这类有前途的材料在其他气体存储应用中打开了大门。该项目旨在提高气瓶的容量，用于存储和输送剧毒气体，如砷化氢（AsH 3），磷化氢（PH 3）和三氟化硼（BF 3），这些气体通常用于半导体制造。 作为一项安全措施，这些剧毒气体目前以低压储存在活性炭填充的气瓶中。然而，活性炭吸附剂的容量受到其不明确的内部孔结构的严重限制。NuMat正在开发更高容量的气瓶，专注于以下关键技术目标：1）设计高度多孔的、明确限定的、结晶的MOF吸收剂以整合到圆筒中，允许在低于大气压的压力下高容量储存这些高毒性气体，3）通过开发高密度M0 F粒料使M0 F在圆筒中的体积储存最大化，以及4）将高密度M0 F粒料整合到圆筒中以取代目前在该商业应用中使用的较低性能的活性炭填充的圆筒。此外，该项目中实现的技术里程碑将有助于为将这类超高性能材料（MOFs）纳入其他气体储存应用奠定必要的基础。

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase II project is in the development of a new hazardous gas storage and delivery system for semiconductor fabrication that will significantly promote worker health and safety benefits at a reduced cost. The new system incorporates a new class of ultra-high performing absorbents, namely Metal-Organic Frameworks (MOFs), that will greatly mitigate the environmental and public health risks by reducing incidents of toxic gas release, chances of equipment damage, and fabrication facility evacuation. Moreover, the use of MOFs enables an increase in the storage capacity while providing savings in ventilation energy, and reducing the risk of leakages over both high pressure mechanical cylinders and sub-atmospheric carbon-based storage. Given the current vast market share of activated carbon cylinders, the higher capacity MOF filled cylinders offer the prospect of substantial decreased in per wafer production costs by minimizing gas cylinder change-outs and fabrication facility downtime. Furthermore, this technology represents the first large scale commercial application for MOFs, thus opening the doors for this promising class of materials for other gas storage applications.This project aims to increase the capacity of gas cylinders for the storage and delivery of highly toxic gases, such as arsine (AsH3), phosphine (PH3), and boron trifluoride (BF3), that are commonly used in semiconductor fabrication. As a safety measure, these highly toxic gases are currently stored at low pressure in activated carbon-filled cylinders. However, the capacity of activated carbon adsorbents is severely limited by their ill-defined internal pore structure. NuMat is developing higher capacity gas cylinders by focusing on the following key technical objectives: 1) Design highly porous, well-defined, crystalline MOF absorbents to be integrated into cylinders, allowing for high capacity storage of these highly toxic gases at sub-atmospheric pressures, 2) Develop industrially relevant MOF scale-up procedures to minimize the cost of production, 3) Maximize the volumetric storage of MOFs in cylinders by developing high density MOF pellets, and 4) Integrate high density MOF pellets into cylinders to displace the lower performing activated carbon filled cylinders currently used this commercial application. Additionally, the technical milestones achieved in this project will help to establish the necessary foundation for incorporating this class of ultra-high performing materials (MOFs) into other gas storage applications.