Test and Simulation

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The results obtained in the first phase of the project MUSIK for individual MEMS components are included in the total system approach in the second phase. It will be investigated the possibilities of MEMS components for power applications such as a transmission path, but also issues such as parasitic coupling by spatial integration, which relate to the functioning of the overall system, are in focus.Part B3 has in Phase 2 of MUSIK the task to expand the developed parametric models for MEMS components from Phase 1, that are adapted to the SiCer composite substrate, such as longitudinal mode MEMS resonators (LMR), or switch structures, in particular to thermal effects and non-linear properties, supported by modeling and finite element simulations and measurement tests. Selected work packages address, inter alia, the modeling of MEMS switches for power applications as well as the occurring mechanical losses and coupling in RF-MEMS resonators. Based on these studies, compact parameterized behavioral models are developed for use in an advanced system simulation and optimization in cooperation with the Parts A1 and A2. The verification of the mechanical models is also supported in other work packages by laser Doppler vibrometry measurements.