Test and Simulation

测试与模拟

• 批准号: 216628603
• 负责人: Dr.-Ing. Christoph Schäffel (†)
• 金额: --
• 依托单位: IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH
• 依托单位国家: 德国
• 项目类别: Research Units
• 财政年份: 2012
• 资助国家: 德国
• 起止时间: 2011-12-31 至 2018-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/216628603?language=en
• 关键词: Test; Simulation

The results obtained in the first phase of the project MUSIK for individual MEMS components are included in the total system approach in the second phase. It will be investigated the possibilities of MEMS components for power applications such as a transmission path, but also issues such as parasitic coupling by spatial integration, which relate to the functioning of the overall system, are in focus.Part B3 has in Phase 2 of MUSIK the task to expand the developed parametric models for MEMS components from Phase 1, that are adapted to the SiCer composite substrate, such as longitudinal mode MEMS resonators (LMR), or switch structures, in particular to thermal effects and non-linear properties, supported by modeling and finite element simulations and measurement tests. Selected work packages address, inter alia, the modeling of MEMS switches for power applications as well as the occurring mechanical losses and coupling in RF-MEMS resonators. Based on these studies, compact parameterized behavioral models are developed for use in an advanced system simulation and optimization in cooperation with the Parts A1 and A2. The verification of the mechanical models is also supported in other work packages by laser Doppler vibrometry measurements.

在MUSIK项目第一阶段获得的单个MEMS组件的结果包含在第二阶段的总系统方法中。它将研究MEMS组件在功率应用（如传输路径）中的可能性，以及与整个系统功能相关的空间集成的寄生耦合等问题。在MUSIK的第二阶段，B3部分的任务是扩展第一阶段开发的MEMS组件参数模型，这些模型适用于SiCer复合材料衬底，如纵向模MEMS谐振器（LMR）或开关结构，特别是热效应和非线性特性，由建模和有限元模拟和测量测试支持。选定的工作包解决，除其他外，用于电源应用的MEMS开关的建模，以及RF-MEMS谐振器中发生的机械损耗和耦合。基于这些研究，开发了紧凑的参数化行为模型，用于与A1和A2部分合作的高级系统仿真和优化。机械模型的验证也支持在其他工作包通过激光多普勒振动测量。