GOALI: Collaborative Research: Energy harvesting nanorods-enhanced MEMS temperature-insensitive gas sensor for combustion monitoring and control

ECCS-1508711，张海峰，北德克萨斯大学，eccs -1508139，王国安，南卡罗来纳大学，eccs -1508862，左磊，弗吉尼亚理工学院摘要：美国能源信息管理局估计，美国67%的能源来自化石燃料，包括煤、石油和天然气。2010年，化石燃料的燃烧占美国温室气体排放量的80%，并产生其他空气污染物，如氮氧化物（NOx）、一氧化碳（CO）和氨（NH3）。为了实现高效、低排放的燃烧技术，迫切需要用于现场监测和实时控制燃烧动力学的先进气体传感器。在这个GOALI项目中，三所大学将与通用电气公司（GE）合作，研究一种新型的自供电压电MEMS气体传感器，该传感器可以检测恶劣燃气轮机环境中关键排放气体的浓度，如NOx， CO和NH3。自供电MEMS气体传感系统将实现高温下气体种类的快速检测和量化，从而彻底改变燃烧过程，实现燃气轮机的现场监测和闭环反馈控制。拟议中的气体传感技术还将有更广泛的应用，如车辆排放控制、燃煤电厂的传感和控制、化学生产、金属铸造和玻璃制造过程的监测。大学与世界领先的涡轮发动机制造商GE之间的互动将指导基础研究，以解决关键的行业需求，并加速实施已开发的知识，以产生直接的行业影响。该项目还将通过新课程开发、毕业生研究指导、本科教育、少数民族和妇女的机会以及K12学生外展，显著惠及三所大学。b)技术摘要：本GOALI提案的目标是研究一种新型自供电无线纳米棒增强型MEMS传感器，用于在高温、高压和大振动条件下的恶劣燃气轮机环境中检测关键燃烧气体NOx、CO、CO2和NH3。三个具有不同背景的学术pi与行业领导者GE合作，在气体传感，能量收集和MEMS制造方面进行基础研究，以解决整个行业在燃烧监测方面的能源效率和环境保护的紧迫挑战。通过三个创新实现了研究目标。首先是设计一种温度不敏感的压电MEMS谐振器，用于高温恶劣环境下的气体传感。二是制造MEMS谐振器，在谐振器顶部生长ZnO纳米棒，用于选择性地吸引气体分子，从而引起MEMS谐振器的频移。三是设计能量采集器，利用燃气轮机发动机的固有热量，为zno谐振传感器和无线收发器提供无限可靠的电源。

ECCS-1508711, Zhang, Haifeng, University of North TexasECCS-1508139, Wang, Guoan, Univ. of South CarolinaECCS-1508862, Zuo, Lei, Virginia Polytechnic Institute Title: GOALI: Collaborative Research: Energy harvesting temperature-insensitive nanorods-enhanced MEMS gas sensor for combustion monitoring and control 2- Brief description of project Goals: Solve critical challenges of combustion gas sensing in harsh environments for in-situ monitoring and real-time control of gas turbinesAbstract:a) Nontechnical Abstract:The Energy Information Administration estimates that 67% of energy generated in the U.S.is from the fossil fuels including coal, petroleum, and natural gas. The combustion of fossil fuels accounts for 80% of greenhouse gas emissions in 2010 in the United States and produces other air pollutants, such as nitrogen oxides (NOx), carbon monoxide (CO), and ammonia (NH3). Advanced gas sensors for in situ monitoring and real-time control of combustion dynamics are urgently needed for implementation of high-efficiency and low-emission combustion technologies. In this GOALI project, three universities will collaborate with General Electric, Inc. (GE) to investigate a novel self-powered piezoelectric MEMS gas sensor, which can detect gas concentrations of key emission gas species such as NOx, CO, and NH3 in harsh gas turbine environments. The self-powered MEMS gas sensing system will realize the rapid detection and quantification of gas species in high temperatures and thus revolutionize combustion processes, enabling in situ monitoring and close-loop feedback control in gas turbines. The proposed gas sensing technology will also have broader applications such as emission control of vehicles, sensing and control of coal-fired power plants, and monitoring of chemical production, metal cast and glass manufacturing processes. The interaction between the universities and the world's leading turbine engine manufacturer GE will guide the fundamental research to solve a critical industry need, and enable accelerated implementation of the developed knowledge to generate immediate industry impacts. This project also will significantly benefit three universities through new course development, research mentoring for graduates, undergraduate education, opportunities for minorities and women, and K12 student outreach. b) Technical Abstract:The objective of this GOALI proposal is to investigate a novel self-powered wireless nanorods-enhanced MEMS sensor to detect key combustion gases NOx, CO, CO2, and NH3 in harsh gas turbine environments with high temperature, high pressure, and large vibration conditions. Three academic PIs with diverse backgrounds team up together with industry leader GE, conducting fundamental research in gas sensing, energy harvesting, and MEMS fabrication to solve an industry-wide urgent challenge in combustion monitoring for energy efficiency and environment protection. The research objective is achieved through three innovations. The first is to design a temperature-insensitive piezoelectric MEMS resonator for gas sensing in high temperature harsh environment. The second is to fabricate the MEMS resonator and grow ZnO nanorods on the top of the resonator, which is used to selectively attract the gas molecules and to subsequently cause the frequency shifts of the MEMS resonator. The third is to design an energy harvester to harness the intrinsic heat of the gas turbine engine to provide an unlimited and reliable power source for the ZnO-based resonant sensor and wireless transceiver.