SBIR Phase I: Lithographic Patterning of Multiple Porous Crystalline Thin Films on Working Silicon Devices for Gas Sensing Applications

SBIR 第一阶段：用于气体传感应用的工作硅器件上的多个多孔晶体薄膜的光刻图案化

• 批准号: 1520563
• 负责人: Steve Yamamoto
• 金额: $ 15万
• 依托单位: Matrix Sensors Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-07-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1520563&HistoricalAwards=false
• 关键词: SBIR; Phase; Lithographic; Patterning; Multiple

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase I project is to enable a new class of gas sensors for the consumer market, specifically in wearables, Internet of Things and smartphones. The technology proposed will sense multiple gases using an inexpensive, compact device with small power requirement. Traditional sensing technology requires a separate device for each gas, making wearable or portable devices impractical. These new devices will be applied in indoor air quality monitoring products such as thermostats, smart lighting, and surveillance cameras; and indoor and outdoor air quality monitoring for wearables and smartphones. These are emerging consumer use cases that could easily exceed 1B units by 2020. The importance of distributed air quality monitoring has been highlighted by recent reports that identify indoor pollution as a significant fraction of the overall pollution exposure for many people. Indoor pollutants vary widely based on the appliances and ventilation used in a particular home or commercial setting, which necessitates continuous monitoring in order to address the problem. There is currently no gas sensor technology capable of delivering this performance with acceptable cost, size, and power requirement.This Small Business Innovation Research (SBIR) Phase I project will build a foundation for the incorporation of porous crystalline hybrid materials into electronic devices. Porous crystalline hybrids have emerged in recent years as a highly attractive class of materials for a host of applications including sensing, catalysis, gas separation, and low-k dielectric materials. For many of these applications the materials must be incorporated into an electronic device as a thin film coating. The techniques for lithographic deposition of these materials, in particular the operating conditions they can endure after being deposited, are almost completely unexplored. Deposition of multiple different porous crystalline hybrids has not been demonstrated. This proposal aims to overcome these obstacles by identifying conditions for reversible protection of porous crystalline hybrid materials during subsequent deposition steps. We anticipate that this work will form the basis for incorporating porous crystals into devices both for gas sensors and for other applications.

这个小型企业创新研究（SBIR）第一阶段项目的更广泛的影响/商业潜力是为消费者市场，特别是可穿戴设备，物联网和智能手机提供新型气体传感器。 所提出的技术将使用廉价、紧凑的设备来感测多种气体，所需功率小。 传统的传感技术需要为每种气体配备单独的设备，这使得可穿戴或便携式设备变得不切实际。 这些新设备将应用于室内空气质量监测产品，如恒温器，智能照明和监控摄像头;以及可穿戴设备和智能手机的室内和室外空气质量监测。 这些都是新兴的消费者用例，到2020年可能会轻松超过10亿台。 最近的报告强调了分布式空气质量监测的重要性，这些报告将室内污染确定为许多人整体污染暴露的重要部分。 室内污染物根据特定家庭或商业环境中使用的电器和通风而变化很大，这需要持续监测以解决问题。 目前还没有一种气体传感器技术能够以可接受的成本、尺寸和功率要求提供这种性能。这个小企业创新研究（SBIR）第一阶段项目将为将多孔晶体杂化材料纳入电子设备奠定基础。 近年来，多孔晶体杂化材料作为一类非常有吸引力的材料出现在许多应用中，包括传感、催化、气体分离和低k介电材料。 对于这些应用中的许多应用，材料必须作为薄膜涂层结合到电子设备中。 用于这些材料的光刻沉积的技术，特别是它们在沉积后可以承受的操作条件，几乎完全未被探索。 多种不同的多孔晶体混合物的沉积尚未得到证实。 该提议旨在通过确定在随后的沉积步骤期间多孔结晶杂化材料的可逆保护的条件来克服这些障碍。 我们预计，这项工作将成为将多孔晶体纳入气体传感器和其他应用的设备的基础。