Pre-Production for Silicon Run Nanoelectronics Video

该项目由美国国家科学基金会（NSF）高级技术教育（ATE）和提高本科生STEM教育（IUSE：EHR）计划支持，将举办一个研讨会，开始开发教育视频材料，记录现代硅基微电子集成电路是如何生产的。 该项目将由加州山景的硅运行制作公司领导。 这项工作的最终目标是制作视频材料，供教育工作者使用，使各级学生受益，特别强调科学、技术、工程、数学和计算机科学本科生以及公众教育。硅基技术对几乎所有消费产品以及支持半导体基础设施的许多行业都至关重要。基于硅的集成电路（IC）微制造也是新兴技术产品的核心，例如结合IC工艺或利用混合形式的微机电系统（MEMS）。由于洁净室和竞争问题，进入最先进的工业微制造场所是有问题的。该项目得到了一个硅基纳米技术集成电路设施的合作，以便制作和拍摄记录材料。 由于很少有机会接触这些设施，预期的教育视频将为学生提供一个真实的世界看看工业集成电路制造上的现代电子产品，如移动的电话依赖。纳米电子视频将功能最先进的制造工艺，用于使今天的平面和三维半导体器件。该项目将开始活动的前期制作阶段，并与教育工作者和工业界举办一次讲习班。研讨会的重点将是审查现有的材料，并探讨视频的可能作用和内容，使其能够最好地为学生和参与的公众服务。在讲习班的投入下，将编写一份暂定脚本，作为微加工设施初步工作的基础。 该项目有一个独特的机会来记录一条专门从事纳米电子和亚22纳米工艺技术的现代化300 mm晶圆生产线。纳米电子视频项目的这一阶段将为现代技术中一个重要领域的高质量文献处理提供第一步，从而对当前半导体加工视频进行长期需要的更新。 预计这项工作将对技术人员、工程师、科学家的教育和培训以及公众教育产生广泛影响。

This project supported by the National Science Foundation (NSF) Advanced Technological Education (ATE) and Improving Undergraduate STEM Education (IUSE:EHR) programs will conduct a workshop to begin development of educational video materials documenting how modern silicon-based microelectronic integrated circuits are produced. The project will be led by Silicon Run Productions of Mountain View, California. The eventual goal of the effort is video material that can be used by educators for the benefit of students at all levels with particular emphasis on undergraduate science, technology, engineering, mathematics, and computer science students and the education of the general public. Silicon-based technology is vital to nearly all consumer products as well as the many industries that support the semiconductor infrastructure. Silicon-based integrated circuit (IC) microfabrication is also central to emerging technological products such as micro-electromechanical systems (MEMS) that incorporate IC processes or utilize hybrid formats. Gaining access to state-of-the-art industrial microfabrication sites is problematic due to cleanroom and competitive issues. The project has been able to enlist cooperation of a silicon-based nanotechnology integrated circuit facility for the purposes of developing and filming documentary material. With otherwise little access to such facilities, the intended educational video will provide students with a real-world look at industrial integrated circuit manufacturing upon which modern electronics such as mobile phones rely.The Nanoelectronics video will feature the most advanced manufacturing processes used to make todays planar and three-dimensional semiconductor devices. This project will begin the pre-production phases of the activity and conduct a workshop with educators and industry. The workshop focus will be to review the existing material and explore the possible role and content of the video so it can best serve students and an engaged general public. With input from the workshop, a tentative script will be written to serve as a basis for preliminary work in the microfabrication facility. The project has a unique opportunity to document a modern 300 mm wafer manufacturing line that specializes in nanoelectronics and sub-22 nm process technology. This phase of the Nanoelectronics video project will provide the first steps toward a high-quality documentary treatment of a vital area in modern technology resulting in a long-needed update to current semiconductor processing videos. The work is expected to have a broad impact on the education and training of technicians, engineers, scientists and the education of the general public.