CAREER: Large Scale Manufacturing of Metasurfaces Using Microsphere Photolithography

职业：使用微球光刻大规模制造超表面

• 批准号: 1653792
• 负责人: Edward Kinzel
• 金额: $ 50万
• 依托单位: Missouri University of Science and Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-03-15 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1653792&HistoricalAwards=false
• 关键词: CAREER; Large; Scale; Manufacturing; Metasurfaces

The research objective of this Faculty Early Career Development (CAREER) project is to generate the fundamental manufacturing science necessary to economically create metasurfaces at large scales. Metasurfaces are microscale-to-nanoscale structured surfaces that are engineered to produce electromagnetic properties beyond what is available in nature, and have many potential fundamental applications applications including enhancing heat transfer, increasing the detection limits of gas sensors, and ultrathin optical devices. Using conventional lithography-based approaches, metasurfaces are very expensive, and as a result are generally produced only at the centimeter scale for laboratory demonstrations. This project will create new manufacturing techniques emphasizing Microsphere Photolithography (MPL), which uses self-assembled microspheres to focus photonic jets into a photoresist layer, generating indentations in the surface. The spheres are subsequently removed to reveal the pattern. The project will rigorously determine the process-structure-metasurface performance relationships for MPL and establish pathways to scale-up to mass production, including roll-to-roll printing and electroforming. The integrated education program will engage students by allowing them to design/build/test devices that demonstrate the improved performance associated with sub-micron structures but at scales that they can handle. A particular emphasis is placed on increasing the involvement of first generation, rural, college students and underrepresented minorities in engineering as well as developing a trained workforce for the rapidly emerging advanced optics sector. This research will create a framework for manufacturing using Microsphere Photolithography (MPL). The project entails four research objectives (1) generation of complex metasurfaces using MPL, (2) improving the yield of the process through improved self-assembly and metrology, (3) scaling the process using reusable masks including a roll-to-roll configuration and (4) integrating the MPL approach with electrodeposition The research will also generate accurate physics based models for the process, including the effects of normal and off-axis illumination. This will facilitate better metasurface performance and address the critical problem of scalable low-cost manufacturing of micro-to-nanostructures in the context of representative test-beds including enhanced radiative cooling of buildings, and planar optics. The research outcomes will be new knowledge about the material/photonic jet interaction, significantly improving the manufacturing platform for the fabrication of metasurfaces and similar structures.

该学院早期职业发展（CAREER）项目的研究目标是产生大规模经济地创建超表面所需的基础制造科学。超表面是微米级到纳米级的结构化表面，其设计目的是产生超出自然界可用的电磁特性，并具有许多潜在的基础应用，包括增强传热、提高气体传感器的检测限和超薄光学器件。使用传统的基于光刻的方法，超表面非常昂贵，因此通常只能以厘米尺度生产用于实验室演示。该项目将创建新的制造技术，重点是微球光刻（MPL），它使用自组装微球将光子射流聚焦到光刻胶层中，在表面产生压痕。随后将球体移除以露出图案。该项目将严格确定 MPL 的工艺-结构-超​​表面性能关系，并建立扩大规模生产的途径，包括卷对卷印刷和电铸。综合教育计划将通过允许学生设计/构建/测试设备来吸引学生，这些设备展示与亚微米结构相关的改进性能，但在他们可以处理的规模上。特别强调增加第一代、农村学生、大学生和代表性不足的少数群体对工程的参与，并为快速新兴的先进光学领域培养训练有素的劳动力。这项研究将创建一个使用微球光刻（MPL）进行制造的框架。该项目有四个研究目标（1）使用 MPL 生成复杂的超表面，（2）通过改进自组装和计量来提高工艺产量，（3）使用可重复使用的掩模（包括卷对卷配置）扩展工艺，以及（4）将 MPL 方法与电沉积相集成。该研究还将为该工艺生成基于物理的精确模型，包括法线和离轴照明的影响。这将促进更好的超表面性能，并解决在代表性测试台（包括增强建筑物辐射冷却和平面光学）的背景下可扩展的低成本制造微纳米结构的关键问题。研究成果将是关于材料/光子射流相互作用的新知识，显着改善超表面和类似结构制造的制造平台。

项目成果

Experimental Investigation of Condensation and Freezing Phenomenon on Hydrophilic and Hydrophobic Titanium Nanopillared Glass Surfaces

• DOI: 10.1080/01457632.2019.1707401
• 发表时间: 2020-01
• 期刊: Heat Transfer Engineering
• 影响因子: 2.3
• 作者: Mohammad Rejaul Haque;Chen Zhu;C. Qu;E. Kinzel;Amy Rachel Betz

Droplet Growth Dynamics during Atmospheric Condensation on Nanopillar Surfaces

• DOI: 10.1080/15567265.2018.1495282
• 发表时间: 2018-07
• 期刊: Nanoscale and Microscale Thermophysical Engineering
• 影响因子: 4.1
• 作者: M. R. Haque;C. Qu;E. Kinzel;A. Betz

Microsphere Photolithography Patterned Nanohole Array on an Optical Fiber

• DOI: 10.1109/access.2021.3059439
• 发表时间: 2021-01-01
• 期刊: IEEE ACCESS
• 影响因子: 3.9
• 作者: Jasim, Ibrahem;Liu, Jiayu;Almasri, Mahmoud
• 通讯作者: Almasri, Mahmoud

Sequential Symmetry-Breaking Events as a Synthetic Pathway for Chiral Gold Nanostructures with Spiral Geometries

• DOI: 10.1021/acs.nanolett.0c05105
• 发表时间: 2021-03-25
• 期刊: NANO LETTERS
• 影响因子: 10.8
• 作者: Golze, Spencer D.;Porcu, Stefania;Neretina, Svetlana
• 通讯作者: Neretina, Svetlana

Accelerated freezing due to droplet pinning on a nanopillared surface

• DOI: 10.1063/1.5048933
• 发表时间: 2018-12
• 期刊: AIP Advances
• 影响因子: 1.6
• 作者: Rachel N. Bohm;M. R. Haque;C. Qu;E. Kinzel;A. Betz