Hyperspectral chromatical reflectometer for measuring of moving objects

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The inspection of surface contour and thin film thickness is an important issue of many process chains, e.g. in semiconductor production. At the Institute for Measurement Systems and Sensor Technology a one-dimensional measurement system for thin film thickness control has been already developed, which is able to simultaneously measure surface contour and distance. Thus, the simultaneous reconstruction of surface contour and thin film thickness is feasible. Since the system measures only in one dimension, a scanning of the surface is necessary. A similar problem has been solved in the satellite-based measurement technology: An imaging hyperspectral system spectroscopically scans the surface of a planet and allows drawing conclusions about surface conditions.This research project aims to combine experiences of both areas. Finally, a two-dimensional hyperspectral thin film reflectometer will be built up, demonstrating the simultaneous measurement of surface topology and thin film thickness. The use in selected applications of mass production technology, e.g. in semiconductor production, medicine technology, organic sensor systems or biological technology, will be investigated by simulations and experiments.