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Hyperspectral chromatical reflectometer for measuring of moving objects

用于测量移动物体的高光谱彩色反射仪

基本信息

批准号：
227527526
负责人：
Professor Dr.-Ing. Alexander W. Koch
金额：
--
依托单位：
Lehrstuhl für Messsystem- und Sensortechnik (MST)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2012
资助国家：
德国
起止时间：
2011-12-31 至 2016-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/227527526?language=en
关键词：
Hyperspectral chromatical reflectometer measuring moving

项目摘要

The inspection of surface contour and thin film thickness is an important issue of many process chains, e.g. in semiconductor production. At the Institute for Measurement Systems and Sensor Technology a one-dimensional measurement system for thin film thickness control has been already developed, which is able to simultaneously measure surface contour and distance. Thus, the simultaneous reconstruction of surface contour and thin film thickness is feasible. Since the system measures only in one dimension, a scanning of the surface is necessary. A similar problem has been solved in the satellite-based measurement technology: An imaging hyperspectral system spectroscopically scans the surface of a planet and allows drawing conclusions about surface conditions.This research project aims to combine experiences of both areas. Finally, a two-dimensional hyperspectral thin film reflectometer will be built up, demonstrating the simultaneous measurement of surface topology and thin film thickness. The use in selected applications of mass production technology, e.g. in semiconductor production, medicine technology, organic sensor systems or biological technology, will be investigated by simulations and experiments.

表面轮廓和薄膜厚度的检查是许多工艺链的一个重要问题，例如：在半导体生产中。测量系统和传感器技术研究所已经开发出用于薄膜厚度控制的一维测量系统，能够同时测量表面轮廓和距离。因此，表面轮廓和薄膜厚度的同时重建是可行的。由于系统仅在一维上进行测量，因此需要对表面进行扫描。基于卫星的测量技术已经解决了类似的问题：成像高光谱系统对行星表面进行光谱扫描，并得出有关表面状况的结论。该研究项目旨在结合这两个领域的经验。最后，将建立一个二维高光谱薄膜反射仪，演示表面拓扑和薄膜厚度的同步测量。在大规模生产技术的选定应用中使用，例如在半导体生产、医学技术、有机传感器系统或生物技术中，将通过模拟和实验进行研究。