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Manufacturing of Self-Powered Nanosensor Systems by Pulsed Laser Processing

通过脉冲激光加工制造自供电纳米传感器系统

基本信息

批准号：
1663214
负责人：
C. Richard Liu
金额：
$ 33.72万
依托单位：
Purdue University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2017
资助国家：
美国
起止时间：
2017-07-01 至 2020-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1663214&HistoricalAwards=false
关键词：
Manufacturing Self Powered Nanosensor Systems

项目摘要

Economically viable self-powered micro and nano devices promise to revolutionize technologies in healthcare, environmental, consumer and military applications. Piezoelectric nanowires can convert mechanical energy into electrical power, and extend the applications for implanted biomedical devices. They can be used where solar energy is unreliable. However, there are significant roadblocks for nano and micro systems to realize their full potential. Current methods used for making these systems require many discrete processes, expensive equipment in addition to a clean room environment resulting in prohibitive cost. Each process requires long preparation, handling and processing times. For faster throughput, huge investments must be made for automation, justifiable only for mass production. In general, cost has become a roadblock against capturing the benefits of most nanotechnology innovations. Therefore, a need in nanomanufacturing is to develop innovative flexible processes that enable integration for efficient small and medium lot size production. This award is to work on a single equipment that can perform multiple tasks required for processing heterogeneous nanomaterials and integrating them into a device. The non-cleanroom method is scalable and has shown more than two-orders-of-magnitude improvement in zinc oxide nanowire performance, reduction of six processes in to one, and reduction of equipment investment by a factor of ten. This research advances the fundamental understanding of the capabilities and performance of this single-step approach for processing and integrating heterogeneous materials and devices. The project plans to recruit female and under-represented minority graduate students, use the research results in new coursework and organize symposia as a platform for stimulating and exchanging new ideas.The overarching goal of this project is to study and develop a novel integrated nanomanufacturing process for self-powered nanosensor systems. The research involves understanding the process-structure-properties-performance relationships in these materials and systems. The objectives of this research project are to uncover the correlations among the nucleation density, growth and morphology of the ZnO nanowire arrays produced by a pulsed laser; the correlation of the piezoelectric properties and the morphology of the ZnO nanowire arrays; the correlation of the performance of the piezoelectric nanogenerator subassembly and the piezoelectric properties, and the integration of a nanosensor into the self-powered nanogenerator system. The main outcome of this research is the understanding of the mechanisms and relationships among pulsed laser parameters, crystal nucleation and morphology control of ZnO nanowire arrays, and its impact on the material properties and performance in self-powered nanosensing systems.

经济上可行的自供电微型和纳米器件有望彻底改变医疗保健、环境、消费和军事应用领域的技术。压电纳米线可以将机械能转化为电能，拓展了植入式生物医学器件的应用。它们可以用在太阳能不可靠的地方。然而，纳米和微米系统要充分发挥其潜力，还存在重大障碍。用于制造这些系统的当前方法除了导致过高成本的洁净室环境之外还需要许多分立的工艺、昂贵的设备。每个过程都需要很长的准备、处理和加工时间。为了更快的生产量，必须对自动化进行巨额投资，只有大规模生产才有理由。总的来说，成本已经成为获取大多数纳米技术创新利益的障碍。因此，纳米制造的需求是开发创新的灵活工艺，以实现高效的中小批量生产的集成。该奖项旨在研究一种设备，该设备可以执行处理异质纳米材料并将其集成到设备中所需的多项任务。非洁净室方法是可扩展的，并且已经显示出氧化锌纳米线性能的两个数量级以上的改进，将六个过程减少到一个，并且将设备投资减少了十倍。这项研究推进了对这种单步方法处理和集成异质材料和器件的能力和性能的基本理解。该项目计划招收女性和代表性不足的少数民族研究生，将研究成果用于新课程，并组织研讨会作为激发和交流新思想的平台。该项目的总体目标是研究和开发一种新的集成纳米制造工艺，用于自供电纳米传感器系统。该研究涉及了解这些材料和系统中的工艺-结构-性能-性能关系。本课题的主要目的是研究脉冲激光作用下ZnO纳米线阵列的成核密度、生长和形貌之间的关系，ZnO纳米线阵列的压电性能和形貌之间的关系。压电纳米发电机子组件的性能与压电性能的相关性，以及将纳米传感器集成到自供电纳米发电机系统中。本研究的主要成果是了解脉冲激光参数，晶体成核和ZnO纳米线阵列的形貌控制之间的机制和关系，以及其对自供电纳米传感系统中材料性质和性能的影响。