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Nanomanufacturing of High-temperature Superconductor Circuits Using Focused Ion Beams

使用聚焦离子束进行高温超导体电路的纳米制造

基本信息

批准号：
1664446
负责人：
Shane Cybart
金额：
$ 32.75万
依托单位：
University of California-Riverside
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2016
资助国家：
美国
起止时间：
2016-10-01 至 2021-09-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1664446&HistoricalAwards=false
关键词：
Nanomanufacturing temperature Superconductor Circuits Using

项目摘要

The research objective is to investigate high-throughput, large-area nanomanufacturing of high-temperature ceramic oxide superconductor electronics. At liquid nitrogen temperature, ceramic oxide materials superconduct, i.e., they conduct electricity without offering resistance. These superconductors are anisotropic and the conductivity varies in different crystallographic directions, which complicates the manufacturing of Josephson junctions, the building-blocks of these circuits. Recent advances in focused ion beam technology has opened up a new resistless direct-write nanomanufacturing method for high-temperature superconductor electronics that has the potential to improve performance and reduce cost. This research involves several disciplines in science and engineering including nanofabrication, superconductor electronics, and cryogenics. The project will develop knowledge and skills in film growth, nanofabrication, mathematical modeling, advanced low noise electron transport measurement techniques as well as critical thinking to prepare students for careers in Science Technology Engineering and Mathematics. The Institute's Faculty Mentor Program will be utilized to create opportunities for women and underrepresented minority students. The superconductor electronics industry will be impacted in areas from high performance cryogenic computing to high temperature semiconductor amplifiers.The challenges to fabricating high transition temperature (high-Tc) ceramic oxide superconductor circuits are several. Its anisotropic crystal structure complicates the manufacture of Josephson junctions. The figure of merit for Josephson junctions scales exponentially with the circuit critical dimension. High performance devices require feature sizes in the sub-10 nanometer regime. Variation of even 1 nm can result in large fluctuations in the figure of merit. Despite these challenges many high-Tc junction manufacturing techniques have emerged over the last three decades but none is able to generate large numbers of Josephson junctions with high-yield and predictable properties. This award utilizes a finely focused 0.5 nm helium ion beam to directly modify the superconducting material for the precise fabrication of nanowires for Josephson junctions. The key to this method is that the material is very sensitive to the oxygen ordering in the crystal lattice which can be altered by light ion irradiation. Restricting this altered region to the nanoscale allows for the creation of in-plane tunneling barriers directly in the material with no resists or etching. The method is compatible with commercially available high-TC superconductor films on relatively inexpensive large area sapphire wafers. There are a number of variables in the parameter space for this process, such as beam current, dose, film thickness, and spatial Josephson junction dimensions. The goal is to study the impact of these parameters throughput, yield, and figure of merit uniformity.

研究目标是研究高温陶瓷氧化物超导电子器件的高通量、大面积纳米制造。在液氮温度下，陶瓷氧化物材料超导，即它们导电而不提供电阻。这些超导体是各向异性的，并且电导率在不同的晶体学方向上有所不同，这使得约瑟夫森结（这些电路的构建模块）的制造变得复杂。聚焦离子束技术的最新进展为高温超导电子器件开辟了一种新的无电阻直写纳米制造方法，该方法具有提高性能和降低成本的潜力。这项研究涉及科学和工程的多个学科，包括纳米制造、超导电子学和低温学。该项目将培养学生在薄膜生长、纳米制造、数学建模、先进的低噪声电子传输测量技术以及批判性思维方面的知识和技能，为学生在科学技术工程和数学领域的职业生涯做好准备。该学院的教师导师计划将用于为女性和代表性不足的少数族裔学生创造机会。超导电子行业将在从高性能低温计算到高温半导体放大器等领域受到影响。制造高转变温度（高 Tc）陶瓷氧化物超导电路面临多个挑战。其各向异性晶体结构使约瑟夫森结的制造变得复杂。约瑟夫森结的品质因数与电路临界尺寸呈指数关系。高性能器件需要 10 纳米以下的特征尺寸。即使 1 nm 的变化也会导致品质因数出现较大波动。尽管存在这些挑战，在过去三十年中已经出现了许多高温结制造技术，但没有一种技术能够产生大量具有高产量和可预测特性的约瑟夫森结。该奖项利用精细聚焦的 0.5 nm 氦离子束直接修改超导材料，以精确制造约瑟夫森结的纳米线。该方法的关键在于该材料对晶格中的氧排序非常敏感，而晶格中的氧排序可以通过轻离子照射来改变。将这种改变的区域限制在纳米级，可以直接在材料中创建面内隧道势垒，无需抗蚀剂或蚀刻。该方法与相对便宜的大面积蓝宝石晶圆上市售的高TC超导薄膜兼容。该过程的参数空间中有许多变量，例如束流、剂量、薄膜厚度和空间约瑟夫森结尺寸。目标是研究这些参数吞吐量、产量和品质因数均匀性的影响。

项目成果

期刊论文数量（13）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Investigation of Arrays of Two-Dimensional High-$T_\text{C}$ SQUIDs for Optimization of Electrical Properties

研究二维 High-$T_ ext{C}$ SQUID 阵列以优化电性能

DOI：
10.1109/tasc.2019.2904481
发表时间：
2019
期刊：
IEEE Transactions on Applied Superconductivity
影响因子：
1.8
作者：
Cho, Ethan Y.;Zhou, Yuchao W.;Khapaev, Mikhail M.;Cybart, Shane A.
通讯作者：
Cybart, Shane A.

Measurement of Magnetic Nanoparticles Using High Transition Temperature Superconducting Quantum Interference Devices

使用高转变温度超导量子干涉装置测量磁性纳米粒子

DOI：
10.1109/tasc.2019.2904479
发表时间：
2019
期刊：
IEEE Transactions on Applied Superconductivity
影响因子：
1.8
作者：
Wang, Ji;Li, Hao;Cho, Ethan Y.;LeFebvere, Jay C.;Cybart, Shane A.
通讯作者：
Cybart, Shane A.

Inductance of YBa$_{2}$Cu$_{3}$O$_{7-\delta }$ Thin-Films With and Without Superconducting Ground Planes

有和没有超导接地层的 YBa$_{2}$Cu$_{3}$O$_{7-delta }$ 薄膜的电感

DOI：
10.1109/tasc.2020.2999390
发表时间：
2020
期刊：
IEEE Transactions on Applied Superconductivity
影响因子：
1.8
作者：
Cai, Han;Li, Hao;Cho, Ethan Y.;Cybart, Shane A.
通讯作者：
Cybart, Shane A.

Inductance Investigation of YBa 2 Cu 3 O 7−δ Nano-Slit SQUIDs Fabricated With a Focused Helium Ion Beam

用聚焦氦离子束制造的 YBa 2 Cu 3 O 7âÎ´ 纳米狭缝 SQUID 的电感研究

DOI：
10.1109/tasc.2019.2898692
发表时间：
2019
期刊：
IEEE Transactions on Applied Superconductivity
影响因子：
1.8
作者：
Li, Hao;Cho, Ethan Y.;Cai, Han;Wang, Yan-Ting;McCoy, Stephen J.;Cybart, Shane A.
通讯作者：
Cybart, Shane A.

Bromine Etching of Patterned YBa 2 Cu 3 O 6+x Nanoscale Thin Films for High-Temperature Superconducting Devices

用于高温超导器件的图案化 YBa 2 Cu 3 O 6 x 纳米级薄膜的溴蚀刻