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Principal effects of ternary oxide dielectric layers on SPR sensors for gas sensing with ellipsometric readout

三元氧化物介电层对椭圆偏振读出气体传感 SPR 传感器的主要影响

基本信息

批准号：
234234843
负责人：
Dr. Andreas Hertwig
金额：
--
依托单位：
Bundesanstalt für Materialforschung und -prüfung (BAM)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2013
资助国家：
德国
起止时间：
2012-12-31 至 2015-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/234234843?language=en
关键词：
Principal effects ternary oxide dielectric

项目摘要

The joint project between BAM, Federal Institute for Materials Research and Testing in Berlin and UJEP, the Jan Evangelista Purkyne University in Usti nad Labem aims to investigate new SPR-based gas sensors containing gold layers with thin dielectric overcoatings. Gold layers as SPR devices will be coated with several different additional oxide layers, such as SnO2, ZnO, TiO2, doped with different other metal ions. The main matrix systems investigated will be SnO2 and ZnO. The underlying gold SPR sensor layers will be produced in the coatings lab at BAM and then modified with sputtered oxide layers in the coatings lab at UJEP. These layer systems will be analysed by means of different spectroscopic ellipsometry to evaluate their dielectric function depending on the doping material and its concentration. Subsequently, gas sensing studies will be carried out with these systems evaluating the changes in sensitivity and long-term stability regarding different gasses and gas mixtures. In this case, the gas carbon monoxide is of special interest. The aim of these studies is to find a correlation between the dopant type and concentration of these layers and their properties as gas-sensing devices. The project part located at BAM and proposed for funding hereby will comprise ellipsometric analysis on the manufactured multilayer systems as well as SPR gas sensing measurements using laser ellipsometry as the detector. Further, an Infrared reflectometry / ellipsometry experiment will be built and used to study the adsorbed gas layer and the chemisorption process in the Fe:SnO2 / CO sensing system.

BAM、柏林的联邦材料研究和测试研究所和UJEP、拉贝河畔乌斯蒂的Jan Evangelista Purkyne大学之间的联合项目旨在研究新的SPR基气体传感器，该传感器包含具有薄介电外涂层的金层。作为SPR器件的金层将涂覆有几种不同的附加氧化物层，例如掺杂有不同的其他金属离子的SnO 2、ZnO、TiO 2。研究的主要基质系统将是SnO 2和ZnO。下面的金SPR传感器层将在BAM的涂层实验室生产，然后在UJEP的涂层实验室用溅射氧化层进行改性。这些层系统将通过不同的光谱椭圆偏振法进行分析，以评估其介电函数取决于掺杂材料及其浓度。随后，将对这些系统进行气体传感研究，评估不同气体和气体混合物的灵敏度和长期稳定性的变化。在这种情况下，气体一氧化碳是特别感兴趣的。这些研究的目的是找到这些层的掺杂剂类型和浓度与其作为气敏器件的性质之间的相关性。位于BAM的项目部分将包括对制造的多层系统进行椭圆偏振分析，以及使用激光椭圆偏振法作为检测器进行SPR气体传感测量。此外，红外反射/椭圆偏振实验将建立和用于研究吸附的气体层和化学吸附过程中的Fe：SnO 2/ CO传感系统。