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Preparation and characterization of microtubes of amorphous metallic thin film systems

非晶金属薄膜微管的制备及表征

基本信息

批准号：
235006964
负责人：
Dr. Horst Wendrock
金额：
--
依托单位：
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden (IFW) e.V.
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2013
资助国家：
德国
起止时间：
2012-12-31 至 2015-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/235006964?language=en
关键词：
Preparation characterization microtubes amorphous metallic

项目摘要

Amorphous metallic films exhibit lower surface roughness, better corrosion resistance and a higher elastic limit compared to crystalline metal films. Thus they can find application as new materials in thin film technology, namely for highly stressed micro-electro-mechanical systems (MEMS) or for sensor and actuator applications. A promising novel fabrication approach is the technique of self-assembling rolled-up micro tubes. The gradient of intrinsic film stress being necessary for rolling up has not been studied so far in detail for amorphous or amorphised metal films.In the present project, amorphous metal films and those crystalline film systems being able to react to amorphous layers shall be produced by magnetron sputtering and shall be characterized in regard to structure and stress state. From these layers, self-assisted rolled-up micro tubes shall be fabricated followed by an amorphisation reaction. Sacrificial layers structured appropriately by lithography are to be used in this step. Ni-Zr as a well-known binary metal system being able to amorphise in a solid state reaction is chosen in the first place. Subsequently, investigations are to be expanded to the Cu-Ti combination. The latter can also be deposited amorphously, furthermore it shows an increased electrical conductivity compared to Ni-Zr and better adhesion on Si.To get more detailed insights in the processes involved, the interface properties and the structure of the micro tubes rolled-up and amorphised shall be studied extensively, considering especially correlations to varied parameters of fabrication and stoichiometry. Further mechanical characteristics of the tubes are to be determined by compression and bending tests and by using a nanoindentation device.

非晶态金属膜与晶态金属膜相比具有较低的表面粗糙度、较好的耐腐蚀性和较高的弹性极限。因此，它们可以作为薄膜技术中的新材料，即用于高应力微机电系统（MEMS）或用于传感器和致动器应用。一种很有前途的新型制造方法是自组装卷起的微管技术。对于非晶或非晶金属膜，卷起所需的膜内应力梯度迄今尚未详细研究。在本项目中，非晶金属膜和能够与非晶层反应的结晶膜系统将通过磁控溅射产生，并应在结构和应力状态方面表征。从这些层，自辅助卷起的微管应制造随后的非晶化反应。在该步骤中使用通过光刻适当结构化的牺牲层。首先选择了能够在固态反应中非晶化的Ni-Zr二元金属体系。随后，研究将扩展到Cu-Ti组合。后者也可以无定形沉积，此外，它显示出增加的导电性相比，Ni-Zr和更好的粘附在Si上。为了得到更详细的见解，在所涉及的过程中，界面特性和结构的微管卷起和无定形应广泛研究，特别是考虑到相关的制造和化学计量的不同参数。管的进一步机械特性将通过压缩和弯曲测试以及通过使用纳米压痕装置来确定。