Piezo-Polymer Actuators for Polymeric Microfluidic Systems

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The goal of this research project is the development of a polymeric micropump with very high flowrate and bubble tolerance. This effect will be realized by using a piezoelectrically actuated pump membrane with extremely high stroke volume. A novel configuration with two ring-shaped piezoelectric actuators that uses bending as well as buckling effects is used to achieve such a high displacement volume. During the project a micropump with a double stroke concept will be developed, that was not realized in MEMS technology before. The double stroke concept doubles the displaced volume per cycle and thus also doubles the electro-mechanical efficiency. In addition to research concerning manufacturing technologies for these pumps a sophisticated non-linear model of the actuator and pump dynamics will be developed. In the end a cost effective but nevertheless powerful micropump shall be realized.