MRI: Acquisition of an Electron-Beam Lithography Tool for Research, Education and Training

MRI：获取用于研究、教育和培训的电子束光刻工具

• 批准号: 2117775
• 负责人: Liang Feng
• 金额: $ 120万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2021
• 资助国家: 美国
• 起止时间: 2021-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2117775&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Lithography

This Major Research Instrumentation (MRI) award supports the acquisition of a state-of-the-art Electron-Beam Lithography (EBL) tool to meet the nanoscale research and teaching needs of the University of Pennsylvania and its academic and industrial neighbors in the Mid-Atlantic region. The EBL instrument enables a wide range of materials and devices to be patterned on the scale of tens of nanometers. The capabilities of this advanced instrument are central to advancing research at the forefront of diverse science and engineering disciplines, including the fundamental exploration of the behavior of charge, spin, light, heat, and motion with applications in photonics and electronics, quantum computation and communication, wearable and implantable health monitoring, micro- and macro-scale energy technologies, and chemo-/bio- and motion sensing. Participating faculty members use the EBL system in educational and outreach activities to broaden participation from underrepresented groups in science and engineering. Undergraduate and graduate students in the engineering and science disciplines will gain valuable research experience and practical knowledge in nanofabrication techniques. The instrument is housed in the Quattrone Nanofabrication Facility, a multi-user research and training facility within the Singh Center for Nanotechnology at the University of Pennsylvania and home to the Mid-Atlantic Nanotechnology Hub (MANTH), an NSF National Nanotechnology Coordinated Infrastructure (NNCI) site. The EBL system is equipped with a dynamic clock for multipass exposure with high-fidelity programmable writing order control, which enables high-throughput, high placement accuracy, high-dose resolution accuracy to pattern structures with nanometer-scale features and desired complexity. The instrument is essential to developing innovative methods to structure materials into architectures for a broad range of topics: photonic and plasmonic light emitters, topological photonic and quantum logical gates, and integrated photonics for high capacity information transmission and processing; quantum materials with exotic band structures for dynamically tunable electronic, optoelectronic, and sensing devices; oxide and halide perovskites with intriguing ferro-, piezo-, and pyro-electricity and the manipulation of their nanoscale interfaces for novel structure and physical properties; large-scale ultralow weight, robust mechanical metamaterials; and 2D to 3D foldable structures of interest for micro- and nano-scale robots, resonators, and sensors. This high-impact research has applications that span computing, communication, health, food-energy-water security, national security, to human-machine interfaces.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该主要研究仪器（MRI）奖支持收购最先进的电子束光刻（EBL）工具，以满足宾夕法尼亚大学及其在大西洋中部地区的学术和工业邻居的纳米级研究和教学需求。EBL仪器能够在数十纳米的尺度上对各种材料和器件进行图案化。这种先进仪器的功能是推进不同科学和工程学科前沿研究的核心，包括电荷，自旋，光，热和运动行为的基础探索，应用于光子学和电子学，量子计算和通信，可穿戴和植入式健康监测，微观和宏观尺度能源技术，以及化学/生物和运动传感。参与的教师使用EBL系统在教育和推广活动，以扩大在科学和工程代表性不足的群体的参与。工程和科学学科的本科生和研究生将获得宝贵的研究经验和纳米纤维技术的实践知识。该仪器位于Quattrone Nanofabstract Facility，这是宾夕法尼亚大学Singh纳米技术中心内的多用户研究和培训设施，也是NSF国家纳米技术协调基础设施（NNCI）的中大西洋纳米技术中心（MANTH）的所在地。EBL系统配备了用于多遍曝光的动态时钟，具有高保真可编程写入顺序控制，可实现高吞吐量、高放置精度、高剂量分辨率精度，以图案化具有纳米级特征和所需复杂性的结构。该仪器对于开发将材料结构化为广泛主题的架构的创新方法至关重要：光子和等离子体光发射器，拓扑光子和量子逻辑门，以及用于高容量信息传输和处理的集成光子学;具有动态可调电子，光电和传感设备的奇异能带结构的量子材料;氧化物和卤化物钙钛矿具有有趣的铁电、压电和热电性，以及它们的纳米级界面的操纵，以获得新的结构和物理特性;大规模超轻重量、坚固的机械超材料;以及用于微米和纳米级机器人、谐振器和传感器的2D到3D可折叠结构。这一高影响力研究的应用范围涵盖计算、通信、健康、食品-能源-水安全、国家安全和人机界面。该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响力审查标准进行评估，被认为值得支持。