MRI: Acquisition of an Electron Beam Lithography System for Quantum Engineering and Nanoscience Research, Education and Training

摘要标题获得最先进的电子束光刻系统，将能够实现材料和器件的高分辨率图案化。摘要将各种材料高分辨率图案化成纳米结构的能力是几乎所有固态材料和器件研究的基本要求。这在高性能经典和量子计算、光子通信、芯片规模光学频率梳、集成传感器、能量收集和灵活电子等关键技术进步中发挥了重要作用。未来的突破将导致远程量子网络、容错量子计算机、微型芯片规模光钟、热传输新材料、个性化医学以及力、位置和导航的纳米传感器。拟议收购科罗拉多博尔德大学最先进的电子束光刻(EBL)系统将提供所需的纳米制造能力。它将极大地加强落基山脉地区以及全国范围内广泛的研究人员和学生的科学研究和教育，包括代表不足的群体。这将有助于解决国家对半导体和量子行业专业知识的需求。电子束曝光的独特能力吸引了的研究项目，科罗拉多博尔德大学的电子束曝光系统引起了人们的浓厚兴趣。该系统将在开放接入的共享用户设施中提供该地区唯一最先进的100千伏电子束写入器。该项目的目标是在科罗拉多博尔德大学收购最先进的电子束光刻系统，该系统将在高图案分辨率、大视场、低拼接/覆盖误差以及具有低侧壁粗糙度的特征方面实现纳米制造能力。对固态纳米器件的研究需要在功能材料上产生复杂、高质量的图案的能力。要取得进一步的进展，能够产生纳米级分辨率、低粗糙度和高质量器件的制造技术至关重要。电子束光刻以其广泛的适用范围、纳米级的分辨率和制造高质量器件的能力，非常适合于将构成纳米、光子、量子和电子技术支柱的下一代器件。该系统将在落基山脉地区和全国范围内引发广泛的纳米科学和量子工程研究，转化材料和设备研究。拟议的EBL系统将极大地加强地区和国家在量子技术、光子学、传感和计量、生物工程和能源等领域的研究与合作，提供目前落基山脉地区大多数研究人员和学生无法获得的制造能力。它将是科罗拉多大学博尔德大学研究的基石，也是落基山地区和全美更广泛的研究社区和行业的基石。这一奖项反映了NSF的法定使命，并通过使用基金会的学术价值和更广泛的影响审查标准进行评估，被认为值得支持。

Abstract TitleThe acquisition of a state-of-the-art electron beam lithography system that will enable high resolution patterning of materials and devices.AbstractThe capability of high-resolution patterning a wide range of materials into nanostructures is a fundamental requirement for almost all solid-state materials and device research. This has been instrumental in key technological advancements including high-performance classical and quantum computing, photonic communications, chip-scale optical frequency combs, integrated sensors, energy harvesting, and flexible electronics. Future breakthroughs will lead to long-distance quantum networks, fault-tolerant quantum computers, miniature chip-scale optical clocks, new materials for thermal transport, personalized medicine, and nanosensors for force, position and navigation. The proposed acquisition of a state-of-the-art electron beam lithography (EBL) system at University of Colorado Boulder will provide the required nanofabrication capabilities. It will greatly enhance scientific research and education for a broad array of researchers and students, including under-represented groups, in the Rocky Mountain Region, as well as nationwide. This will help to address the national need for expertise in the semiconductor and quantum industries. The EBL’s unique capabilities have attracted over 64 research programs, with strong interest in an electron beam lithography system at University of Colorado Boulder. The system will provide the region’s only state-of-the-art 100 kV electron beam writer in an open access shared user facility. The goal of the project is the acquisition of a state-of-the-art electron beam lithography system at the University of Colorado Boulder that will enable nanofabrication capabilities in terms of high pattern resolution, large field of view, low stitching/overlay errors and features with low side-wall roughness. Research on solid-state nano-scale devices requires the ability to produce complex, high-quality patterns on functional materials. For further progress, fabrication techniques that yield nanometer-scale resolution, low roughness, and high quality devices are critical. Electron beam lithography, with its wide applicability to a vast array of materials, nanometer-scale resolution, and ability to produce high quality devices is well-suited to the next generation of devices that will form the backbone of nano-, photonic, quantum and electronic technology. The system will spark a wide array of nanoscience and quantum engineering research, transforming materials and device research in the Rocky Mountain region and on a national scale. The proposed EBL system will greatly enhance regional and national research and collaboration in the areas of quantum technologies, photonics, sensing and metrology, bioengineering, and energy, providing fabrication capabilities currently unavailable to most researchers and students in the Rocky Mountain Region. It will be a cornerstone for the research at the University of Colorado Boulder, as well as for the broader research community and industry in the Rocky Mountain Region and across the United States.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.