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Sensor systems based on the DeltaE Effect

基于 DeltaE 效应的传感器系统

基本信息

批准号：
269910797
负责人：
Professor Dr. Franz Faupel
金额：
--
依托单位：
Fraunhofer-Institut für Siliziumtechnologie (ISIT)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2015
资助国家：
德国
起止时间：
2014-12-31 至 2016-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/269910797?language=en
关键词：
Sensor systems based DeltaE Effect

项目摘要

Within the framework of the SFB 855, a new magnetic field sensor was developed which is based on the DeltaE Effect. It exploits the frequency shift of a cantilever, oscillating at high frequencies in the 100 kHz range, which is coated with a magnetostrictive layer whose effective Youngs modulus changes depending on the magnetic field (DeltaE effect). The sensor, which was presented in Nature as Research Highlight, allows broadband magnetic field measurements at low frequencies down to the DC range, is robust against microphony effects and mechanical noise, and provides full device integrability. In joint preparatory work, the applicants demonstrated a first fully integrated sensor where the electrical readout as well as the mechanical excitation was achieved by a single piezoelectric layer.The proposed project aims at integrating DeltaE sensors into MEMS technology and at pursuing different approaches to enhance their sensitivity. The ultimate aim are applications in magnetocardiography. Concerning the piezoelectric resonators, it is intended to utilize different sensor geometries based on bending modes as well as on longitudinal modes, which occur at substantially higher frequencies and provide better mechanical quality factors. The corresponding MEMS processes have to be developed. AlN and a modification with lower Youngs modulus for the reduction of clamping effects will be used as piezoelectric materials. Various methods are established for magnetoelectric sensors to obtain large changes in mechanical properties in a magnetic field. The applicability of these approaches to DeltaE sensors will be investigated in the present project. In addition to the well approved amorphous FeCoBSi alloys, it is also planned to use amorphous FeGaB alloys, which due to their higher coercivity and larger magnetostriction should be superior for sensors with remanent instead of an external bias field. For a better understanding of the magnetic materials, in situ magneto-optical Kerr effect measurements on the oscillating cantilever are planned in cooperation with P2. The electronics for operating the sensors will be developed along with the sensor development.

在SFB 855的框架内，开发了一种基于DeltaE效应的新型磁场传感器。它利用了悬臂梁的频移，在100 kHz范围内以高频振荡，该悬臂梁涂覆有磁致伸缩层，其有效杨氏模量根据磁场而变化（DeltaE效应）。该传感器在《自然》杂志上作为研究亮点发表，允许在低至直流范围的低频下进行宽带磁场测量，对颤噪效应和机械噪声具有鲁棒性，并提供完整的器件集成性。在联合筹备工作中，申请人展示了第一个完全集成的传感器，其中电读出以及机械激励是通过一个单一的压电层实现的。拟议的项目旨在将DeltaE传感器集成到MEMS技术中，并寻求不同的方法来提高其灵敏度。最终目标是在心磁图中的应用。关于压电谐振器，旨在利用基于弯曲模式以及基于纵向模式的不同传感器几何结构，其在显著更高的频率下发生并且提供更好的机械品质因数。相应的MEMS工艺也需要开发。AlN和具有较低的杨氏模量以减少夹持效应的改性物将被用作压电材料。建立了用于磁电传感器的各种方法，以获得磁场中机械特性的大变化。本项目将研究这些方法对DeltaE传感器的适用性。除了得到充分认可的非晶FeCoBSi合金之外，还计划使用非晶FeGaB合金，由于其较高的介电性和较大的磁致伸缩性，其对于具有反射而不是外部偏置场的传感器来说应该是上级的。为了更好地了解磁性材料，在原位磁光克尔效应测量振荡悬臂梁计划与P2合作。操作传感器的电子设备将沿着传感器的开发。