Functionalized diamond optomechanical circuits for infrared spectroscopy and site-specific gas sensing applications

钻石具有卓越的材料性能和可靠的加工技术。大带隙、机械稳定性、大杨氏模数、高导热系数和化学惰性使金刚石成为一种特别吸引人的光学和机械应用材料。通过使用化学气相沉积，可以制备晶片规模的基片，以用于具有工业意义的可重复和标准化的器件制造。利用在实现大规模光学电路和片上纳米机械谐振器方面的最新进展，从而允许在统一技术中利用这两个自由度。在这个项目中，将使用金刚石纳米器件来结合光学光谱和红外波长下气体相中的机械传感。利用集成纳米光子电路中的光学机械原理，提供了一个灵活的平台，其中光学和机械谐振器都耦合到光子总线波导上，用于并行读出和片上多路复用。通过走向钻石平台，这项提议特别旨在将光学机械系统的光谱工作范围扩展到中/长红外波长区域。为了实现目标特定的传感器，将采用平行浸笔式纳米光刻(DPN)对光机谐振器进行功能化。通过DPN提供的纳米分辨率，将准备单独的谐振器用于现场特定质量传感，以便能够在单个设备中同时读出多个分析物。因此，通过光谱定性分析和基于纳米机械传感的定量分析都将使高灵敏度的容错表征成为可能。因此，该项目将为光子集成电路的宽带光学操作建立一个新的材料平台；它将把目前光学机械设备的工作光谱范围扩展到远至红外；该项目将能够实现具有现实应用潜力的光学机械鼻子传感器阵列的原型。

Diamond offers outstanding material properties paired with reliable processing techniques. The large bandgap, mechanical stability, large Youngs modulus, high thermal conductivity and chemical inertness make diamond a particularly attractive material for joined optical and mechanical applications. By employing chemical vapor deposition waferscale substrates can be prepared for reproducible and standardized device manufacture with industrial relevance. Taking advantage of recent progress in realizing large-scale optical circuits and on-chip nanomechanical resonators thus allows for leveraging both degrees of freedom in a unified technology. In this project diamond nanoscale devices will be employed for combined optical spectroscopy and mechanical sensing in the gase phase at infrared wavelengths. Exploiting optomechanical principles in integrated nanophotonic circuits provides a flexible platform in which both optical and mechanical resonators are coupled to photonic bus waveguides for parallel readout and multiplexing on chip. By moving towards a diamond platform, this proposal aims in particular at stretching the spectral operation range of optomechanical systems into the mid- / long-infrared wavelength regime. In order to achieve target specific sensors the optomechanical resonators will be functionalized using parallel dip-pen nanolithography (DPN). Through the nanometer resolution provided by DPN individual resonators will be prepared for site-specific mass-sensing, in order to enable the simultaneous readout of multiple analytes in a single device. Thus both qualitative analysis through optical spectroscopy and quantitative analysis based on nanomechanical sensing will enable fault-tolerant characterization with high sensitivity. The project therefore will lead to the establishment of a new material platform for broadband optical operation of photonic integrated circuits; it will extend the operation spectral range of current optomechanical devices far into the infrared; and the project will allow for implementing prototype optomechanical nose sensor arrays with potential for real-world applications.