Functionalized diamond optomechanical circuits for infrared spectroscopy and site-specific gas sensing applications

金刚石提供了出色的材料性能与可靠的加工技术相结合。大带隙、机械稳定性、大杨斯模量、高导热性和化学惰性使金刚石成为光学和机械结合应用的特别有吸引力的材料。通过化学气相沉积，可以制备具有工业相关性的可重复性和标准化器件制造的晶圆级衬底。利用最近在实现大规模光学电路和片上纳米机械谐振器方面的进展，因此可以在统一的技术中利用这两个自由度。在这个项目中，金刚石纳米级器件将用于红外波长气相的光学光谱和机械传感。利用集成纳米光子电路中的光力学原理提供了一个灵活的平台，其中光学和机械谐振器耦合到光子总线波导上，用于芯片上的并行读出和多路复用。通过向钻石平台移动，该方案特别旨在将光机械系统的光谱工作范围扩展到中/长红外波长范围。为了实现目标特异性传感器，将采用平行浸笔纳米光刻技术（DPN）对光机械谐振器进行功能化。通过DPN提供的纳米分辨率，将为特定位点的质量传感准备单个谐振器，以便在单个设备中同时读出多个分析物。因此，通过光谱学的定性分析和基于纳米力学传感的定量分析都将实现高灵敏度的容错表征。因此，该项目将导致建立光子集成电路宽带光操作的新材料平台；将现有光机械器件的工作光谱范围扩展到远红外线；该项目将允许实现具有实际应用潜力的原型光学机械鼻子传感器阵列。

Diamond offers outstanding material properties paired with reliable processing techniques. The large bandgap, mechanical stability, large Youngs modulus, high thermal conductivity and chemical inertness make diamond a particularly attractive material for joined optical and mechanical applications. By employing chemical vapor deposition waferscale substrates can be prepared for reproducible and standardized device manufacture with industrial relevance. Taking advantage of recent progress in realizing large-scale optical circuits and on-chip nanomechanical resonators thus allows for leveraging both degrees of freedom in a unified technology. In this project diamond nanoscale devices will be employed for combined optical spectroscopy and mechanical sensing in the gase phase at infrared wavelengths. Exploiting optomechanical principles in integrated nanophotonic circuits provides a flexible platform in which both optical and mechanical resonators are coupled to photonic bus waveguides for parallel readout and multiplexing on chip. By moving towards a diamond platform, this proposal aims in particular at stretching the spectral operation range of optomechanical systems into the mid- / long-infrared wavelength regime. In order to achieve target specific sensors the optomechanical resonators will be functionalized using parallel dip-pen nanolithography (DPN). Through the nanometer resolution provided by DPN individual resonators will be prepared for site-specific mass-sensing, in order to enable the simultaneous readout of multiple analytes in a single device. Thus both qualitative analysis through optical spectroscopy and quantitative analysis based on nanomechanical sensing will enable fault-tolerant characterization with high sensitivity. The project therefore will lead to the establishment of a new material platform for broadband optical operation of photonic integrated circuits; it will extend the operation spectral range of current optomechanical devices far into the infrared; and the project will allow for implementing prototype optomechanical nose sensor arrays with potential for real-world applications.