Micropatterned polymer-derived ceramic catalysts and sensors

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Polymer-derived ceramics (PDCs) are materials which have been intensively studied in the last four decades. They describe a new class of ceramics which can be prepared without any additives by thermal handling of appropriate precursors in inert or reactive atmosphere. Since the precursors are of polymeric nature, they can be subjected to a large variety of different shaping techniques to fabricate monoliths, coatings, fibers, porous parts as well as micro parts. PDCs present exceptional properties such as oxidation and corrosion stability as well as crystallization and creep resistance up to very high temperatures. They have been also shown to possess interesting and intriguing functional properties such as optical properties, tunable electrical properties, as well as catalytic and photocatalytic activity.Within the present proposal, a fundamental study on the feasibility of polymer-derived ceramic nanocomposites to be used as micro components in devices for catalytic and sensing applications will be performed. The first main goal will be to select polymer-derived ceramic systems with catalytic and sensing properties (i.e., SiOC/MOx, SiCN/M(N), and SiCN/MSix; M = transition metal) and to assess their processability with respect to photolithographic micropatterning. Photolithography of selected polymeric precursors followed by cross-linking and ceramization will be used to generate ceramic microcomponents with tailored properties profile. A second aim which will be addressed in the frame of the present proposal is related to the integration of the target ceramic microcomponents within micro devices for catalytic and sensing purposes. Thus, three model micro devices have been defined as primary target: microstructured catalytic arrays, pellistors, and chemiresistors. The processing technology which will be developed within the present proposal will provide a facile/novel access to MEMS-type devices to be operated at high temperatures and in harsh environmental conditions.