Novel mode-matched MEMS gyroscope with high capacity to tune frequency and Q-factor

新型模式匹配 MEMS 陀螺仪，具有高频率和 Q 因子调谐能力

• 批准号: 21J11628
• 负责人: 陳 建霖
• 金额: $ 0.96万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for JSPS Fellows
• 财政年份: 2021
• 资助国家: 日本
• 起止时间: 2021-04-28 至 2023-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21J11628/
• 关键词: Rate integrating gyro; MEMS resonator; triple mass resonator; Triple mass resonator; Anchor loss tuning; Squeeze film damping; Frequency tuning; Mode matched resonator

This research introduces a novel triple mass resonator (TMR) and a two-axis symmetric resonator with multiple proof masses for improving stiffness sensitivity and tuning capability of MEMS res- onators. The frequencies of the anti-phase (ωanti) and in-phase (ωin) modes have a strong dependency on the suspension and inner stiffness, respectively. Therefore the frequency difference can be electro- statically tuned by either suspension stiffness nor inner stiffness. The amplitude ratio can be adjusted largely by decreasing the inner stiffness, which brings a significant change in Q-factor related to anchor loss or squeeze film damping, while a negligible shift in frequency ωanti. When the frequency ωanti is tuned by decreasing suspension stiffness of two main proof masses, only a slight change in the mode shape, i.e. the amplitude ratio, is observed causing a minor adjustment to Q-factor. Therefore the frequency ωanti and Q-factor can be tuned independently under a little mutual influence.A two-axis symmetric tuning fork resonator based on TMR technique is applied for QFM/RIG. Two dynamically equivalent proof masses provide a balance dynamic system and four extra-small masses is implemented in between them, which could tune the Q-factor of two anti-phase modes independently with small effect on the frequency. Frequency is mainly affected by suspension stiffness and Q-factor is strongly dependent on the squeeze film damping through the mode coupling between two balanced masses and small masses.

为了提高MEMS谐振器的刚度、灵敏度和调谐能力，本研究提出了一种新型的三质量谐振器(TMR)和具有多个验证质量的两轴对称谐振器。反相(ω反)和同相(ωIn)模式的频率分别与悬架和内部刚度有很强的相关性。因此，频率差可以通过悬挂刚度或内部刚度进行静电调谐。变幅比可以通过减小内部刚度进行很大程度的调整，这将使与锚杆损失或挤压油膜阻尼有关的Q因子发生显著变化，而频率ω的漂移可以忽略不计。当通过降低两个主质点的悬架刚度来调谐频率ω抗时，只观察到振型的微小变化，即幅值比，导致对Q因子的微小调整。因此，频率、ω、反和Q因子可以在很小的相互影响下独立调谐。基于三磁阻技术的两轴对称音叉谐振器应用于QFM/RIG。两个动态等效证明质量提供了一个平衡的动力系统，它们之间实现了四个超小质量块，可以在对频率影响很小的情况下独立调整两个反相模式的Q因数。频率主要受悬挂刚度的影响，而Q因子通过两个平衡质量和小质量之间的模式耦合强烈地依赖于挤压油膜阻尼。

项目成果

Rate Integrating Gyroscope Tuned by Focus Ion Beam Trimming and Independent CW/CCW Modes Control

通过聚焦离子束微调和独立 CW/CCW 模式控制调谐的速率积分陀螺仪

• 发表时间: 2023
• 作者: 稲垣慶修;佐々木浩一;Jianlin Chen
• 通讯作者: Jianlin Chen

Frequency and Quality Factor Matched 2-Axis Dual Mass Resonator

频率和品质因数匹配的 2 轴双质量谐振器

• 发表时间: 2021
• 作者: Shimajiri Takuya;Jacquot de Rouville Henri-Pierre;Heitz Val?rie;Akutagawa Tomoyuki;Fukushima Takanori;Ishigaki Yusuke;Suzuki Takanori;末木 愛子・上田 悠介・増田 侑亮・澤村 正也;井上雅理;Jianlin Chen
• 通讯作者: Jianlin Chen

音叉型振動子および音叉型振動子の調整方法

音叉式振动器及音叉式振动器的调整方法

• 发表时间: 2021

A Mechanically Coupled Three Degree-of-Freedom Resonator with Tunable Stiffness Sensitivity

• DOI: 10.1016/j.sna.2022.113713
• 发表时间: 2022-06
• 期刊: Sensors and Actuators A: Physical
• 作者: Jianlin Chen;T. Tsukamoto;Shuji Tanaka

Politecnico di Milano/Department of Electronics(イタリア)

米兰理工大学/电子系（意大利）