High Performance Simulation Tools for Complex MEMS Resonator Design

该奖项是根据2009年美国复苏和再投资法案(公法111-5)资助的。这项工作的目标是开发准确和高效的计算方法，用于模拟下一代传感阵列和通信电路等微型机电设备中的谐振阻尼。为了解决与这类问题相关的中心困难，研究人员将开发在频域中求解控制方程的特殊迭代方法；他们还将研究涉及由窄带高斯脉冲激励的系统与不连续Galerkin方法相结合的时域分析方法的使用。该项目将进一步解决发展准确、有效的无限区域辐射边界条件以及为提高效率而降阶模型的核心问题。理论工作将得到一系列基准实验的补充。如果成功，所开发的方法将为器件设计者提供模拟、理解和修改基于谐振的设计的能力，以便在进行昂贵的原型制造之前优化性能。这将带来更快、更具成本效益的设计周期。人们还希望，这将使设计师能够尽快创造出基于谐振式的下一代微型机电系统。辐射边界条件和模型降阶技术方面的工作也可用于需要模拟无限大域的各种情况？例如在天气预报、声纳应用等方面。将收集和传播的基准数据也将推动其他研究小组审查类似问题的工作。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The objective of this work is to develop accurate and efficient computational methods for the simulation of resonant damping in micro-electromechanical devices such as are planned for next generation sensing-arrays and communication circuitry. To address the central difficulty associated with such problems, the researchers will develop special iterative methods for solving the governing equations in the frequency domain; they also will examine the use of time domain analysis methods involving system excitation by narrow-band Gaussian pulses in combination with discontinuous Galerkin methods. The project will further address the central question of the development of accurate efficient infinite domain radiation boundary conditions as well as reduced order models for enhanced efficiency. The theoretical work will be complimented by a set of benchmark experiments.If successful, the methods developed will provide device designers the ability to simulate, understand, and modify resonant based designs to optimize performance before engaging in costly prototype fabrication. This will result in more rapid and cost effective design cycles. It is also hoped this will enable designers to create the next generation of resonant based micro-electromechanical systems sooner rather than later. The work on radiation boundary conditions and model reduction techniques can also be leveraged for use in a wide variety of situations where simulation of infinite domains is needed ? such as in weather prediction, sonar applications, etc. The benchmark data to be collected and disseminated will also advance the work of other research groups examining similar problems.