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Elucidating the effect of boundary curvature on the wrinkling of thin suspended films by theory and experiment

通过理论和实验阐明边界曲率对悬浮薄膜起皱的影响

基本信息

批准号：
21K03782
负责人：
JANSSENS Stoffel
金额：
$ 1.25万
依托单位：
Okinawa Institute of Science and Technology Graduate University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2021
资助国家：
日本
起止时间：
2021-04-01 至 2024-03-31
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21K03782/
关键词：
wrinkling diamond nanochannel nanofluidics laser glass etching thin films

项目摘要

We synthesized ultra-thin nanocrystalline diamond (NCD) films on Corning Lotus NXT glass substrates with microwave plasma-enhanced chemical vapor deposition. We patterned these films through direct femtosecond laser writing. We accidentally found that nanochannels could be made between the glass substrate and the nanocrystalline diamond film at relatively low laser pulse energies. At relatively high laser pulse energies, portions of the film could be removed, which was our initial goal. Techniques such as focused ion beam milling and electron-beam lithography are currently used to fabricate open nanochannels that are sealed by intricate processes. Manufacturing nanochannel-based devices by such traditional methods is therefore complex, expensive, and time-consuming, hindering progress in the field. Our method for nanochannel manufacturing overcomes such issues and consequently has a high-impact potential. We further investigated the mechanism behind our method and demonstrated that the nanochannels conduct water by fabricating a nanofluidic device. A patent will be filed in April 2023. Immediately after that, we will submit a manuscript to an international journal.In parallel, we also found new phenomena in the wrinkling of NCD films that are compressively strained after deposition and partly released from the glass substrate through substrate etching. Boundary curvature is observed to play a role in the wrinkling of these films, which follows our hypothesis. However, we found that the amount of substrate etched also plays a crucial role.

利用微波等离子体增强化学气相沉积技术在康宁莲花NXT玻璃衬底上合成了超薄纳米晶金刚石（NCD）薄膜。我们通过直接飞秒激光书写来制作这些薄膜的图案。我们偶然发现，在相对较低的激光脉冲能量下，可以在玻璃衬底和纳米晶金刚石薄膜之间形成纳米通道。在相对较高的激光脉冲能量下，部分薄膜可以被去除，这是我们最初的目标。聚焦离子束铣削和电子束光刻等技术目前被用于制造通过复杂工艺密封的开放纳米通道。因此，用这种传统方法制造基于纳米通道的器件是复杂、昂贵和耗时的，阻碍了该领域的进展。我们的纳米通道制造方法克服了这些问题，因此具有高影响力的潜力。我们进一步研究了我们的方法背后的机制，并通过制造纳米流体装置证明了纳米通道导电。专利将于2023年4月申请。之后，我们将立即向国际期刊投稿。同时，我们还发现了NCD薄膜的起皱新现象，这些薄膜在沉积后被压缩应变，并通过衬底蚀刻从玻璃衬底上部分释放。观察到边界曲率在这些薄膜的起皱中起作用，这符合我们的假设。然而，我们发现承印物的蚀刻量也起着至关重要的作用。