multilayer coated Carbon and SiC fibers

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Coating of carbon fibres and SiC fibres via ALD - with titaniumphosphate using the precursors o titanium tetrachloride andtris(trimethylsilyl)phosphate o titanium isopropoxide andtriethylphosphat o titanium isopropoxide andtris(trimethylsilyl)phosphate - with aluminium phosphate using theprecursors o trimethylaluminium and tris(trimethylsilyl)phosphat - withmultilayers of oxides (Al2O3, TiO2), phosphates and inorganicorganichybride material (TiO2 – furfuryl alkohol)