Deposition of the system Mo-N-(Ag) by using highly-ionized PVD methods and its investigation with regard to high performance wear protection and electrical sliding contact

在能源效率的约束下，材料被逼到了弹性的边界。例如，高温和机械磨损的组合是重型机械过程。类金刚石碳（DLC）涂层对于该应用的适用性有限。基于Mo-N的涂层似乎更有前途。此外，将在项目中开发的Mo-N-（Ag）系统作为德国电力工业工业部门的电气滑动触头的涂层材料具有一定的相关性。这些涂层具有满足电源功率密度要求的潜力。分别由Mo-N或研究较少的Mo-N-Ag系统制成的高性能耐磨涂层由于形成层状MoO 3相、Magnéli相或Ag相而显示出低摩擦系数。对于第一次三种不同的PVD技术-直流磁控溅射（dcMS），高功率脉冲磁控溅射（HiPIMS）和脉冲激光沉积（PLD）-平行使用这些涂层的合成。这些技术在溅射物质的电离度和N2气体的电离/解离度方面有很大不同。Mo-N-（Ag）系统的涂层性能可以通过控制等离子体条件来定制。基本的科学技术目标是要求化学计量的Mo-N涂层的沉积，通过与银合金化开发新的高性能的Mo-N-（Ag）涂层和优化适当的电和机械摩擦学性能。最后，通过获得等离子体和涂层的性能并通过它们之间的相互关联，将实现对涂层系统的性能的系统理解。所得结果将为建立Mo-N-Ag涂层摩擦学和电学行为的经验模型提供依据。该项目将为以下问题做出重要贡献：我们需要多少电离与动能相结合，才能使成膜物质选择性地定制涂层性能，例如能够控制Mo-N的化学计量。

With the constraint of energy efficiency, materials are forced to the border of resilience. The combination of high temperature and mechanical wear for example is a heavy-duty mechanical process. Diamond-like carbon (DLC) coatings are of limited suitability for this application. Coatings on the basis of Mo-N seem to be more promising. Additionally, the system Mo-N-(Ag) which will be developed within the project, has certain relevance as coating material for electrical sliding contacts for the industrial sector of German electrical power industry. These coatings have the potential to fulfill the requirements with respect to power density for the electrical power supply.High performance wear protecting coatings made from Mo-N or from the less studied system Mo-N-Ag, respectively, show low friction coefficients due to the formation of the lamellar MoO3 phase, Magnéli phases or Ag molybdate phases. For the first time three different PVD techniques - dc magnetron sputtering (dcMS), high power impulse magnetron sputtering (HiPIMS) and pulsed laser deposition (PLD) - are utilized in parallel for the synthesis of those coatings. These techniques differ drastically with respect to the ionization degree of the sputtered species and to the ionization/dissociation degree of the N2 gas. The coating properties of the system Mo-N-(Ag) can be tailored by the control of the plasma conditions. The essential scientific-technological goals are the demanding deposition of stoichiometric Mo-N coatings, the development of new high performance Mo-N-(Ag) coatings by alloying with silver and the optimization of appropriate electrical and mechanical-tribological properties.Finally, a systematic understanding of the performance of the coating systems will be achieved by acquiring the plasma and coatings properties and by correlating them with each other. The obtained results will serve for the setting up of an empirical model for the tribological and electrical behavior of Mo-N-Ag coatings. The project will deliver an important contribution to the question of how much ionization in combination with kinetic energy do we need for the film-forming species to tailor selectively coating properties like for example to be able to control the stoichiometry of Mo-N.