Two-dimensional Array of Planar Microlens and Its Applications for Optical Commponents

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We have proposed a distributed-index planar microlens which can be fabricated by a planar technology; i.e. we selectively diffuse a dopant which the refractive index change. In this study, we are aiming at the reduction of aberration and the increase of the numerical aperture of microlens, and the demonstration of the stacked planar optics.1. The distributed-index formation process in a planar microlens is made clear. Also, the theoretical basis of the improvement of a planar microlens is established.1) We indicated that the diffusion constant of the ion strongly depends on its density in a glass substrate, and it quite influences the formation of microlens with large numerical aperture and small wave aberration.2) The optimum conditions for the microlens made by the ion-exchange technique are given.2. We have developed a transverse electromigration where the electric field is applied in transverse direction for reproducible fabrication and mass-production of planar microleses.3. We have obtained a planar microlens with the largest numerical aperture of 0.54 with stacked two lenses, by using a substrate to increase the exchanging ions.4. To show the possibility of 2-D stacked planar optics, we demonstrated an optical tap array, fiber coupler array branching component, and so on.