Development of null test measurement system of aspherical mirror shape by scatter plate interferometer

散射板干涉仪非球面镜形零位测试测量系统的研制

• 批准号: 62850004
• 负责人: HONDA Toshio
• 金额: $ 6.91万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1987
• 资助国家: 日本
• 起止时间: 1987 至 1988
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-62850004/
• 关键词: Scatter Plate interferometer; null test; zone-plate; common path; conic aspherical surface; fringe scan; fringe-analysis; 縞画像処理; 偏光干渉; PZT; 形状回帰

Main-mirror of big astronomical telescope has concave and rotationally symmetric aspherical shape. The performance of the telescope is greatly influenced by the precision of the shape of the mirror.As a method for measuring the surface shape and/of the characteristics of optical systems, conventional interferometers have been widely used. But, if the conventional interferometer such as Twyman-Green one is used, many interference fringes generate and the interval of fringes becomes very narrow when deep aspheric surface is measured.For overcoming these defects, computer generated hologram ( CGH ) or special optical elements are used. But these interferometers are fundamentally different-path interferometers, and can not be used for aspheric surfaces with large aperture-size and long radius of curvature.For the interferometric measurement of these surfaces, the common-path interferometric method is inevitable. So, the purpose of this research is to develop null-test scatter-plate interfe … More rometer for measuring concave deep aspheric surfaces with rotationally symmetry.The scatter-plate interferometer is one of common-path interferometers, and the principle of null-test by this interferpometer is as follows. A scatter-plate with larger aperture size of which characteristics are point-symmetry are used and a pinhole is set apart from the position behind the scatter-plate. In this optical set-up, the reference wave-front becomes aspheric and can be made almost equal to the wave-front which is reflected from the aspheric concave mirror under test. As a result, null-test can be realized.A zone-plate interferometer is also common-path interferometer and a specially optically made zone-plate can be regarded as equivalent with a scatter-plate when the zone-plate is used in the above mentioned interfero-meter instead of the scatter-plate.In this researh, at first, the priciple of null-test on scatter-plate interferometer is made clear, and next, the relation between the scatter-plate and the zone-plate interferometer is compared. Then, two kinds of fringe-scanninig techniqes which can be applied to common-path interferometer are developed and practised. And finally, computer-controlled fringe pattern aquisition and analysis system is constructed. Less

大型天文望远镜主镜为凹面旋转对称非球面。望远镜的性能很大程度上取决于反射镜的形状精度，传统的干涉仪作为测量光学系统表面形状和/或光学系统特性的一种方法，得到了广泛的应用。但是，采用传统的干涉仪（如Twyman-Green干涉仪）测量深非球面时，会产生大量干涉条纹，条纹间距很窄，为了克服这些缺陷，需要采用计算全息（CGH）或特殊光学元件。但这些干涉仪本质上都是异光路干涉仪，不能用于大口径、长曲率半径的非球面，对于这类表面的干涉测量，共光路干涉法是必然的。因此，本研究的目的是研制零检测散射板干涉仪， ...更多信息 本文介绍了一种用于测量旋转对称深凹非球面的干涉仪，散射板干涉仪是共光路干涉仪的一种，其零位检测原理如下。使用具有点对称特性的具有较大孔径尺寸的散射板，并且在远离散射板的后面的位置处设置针孔。在这种光学装置中，参考波前变成非球面的，并且可以使其几乎等于从被测的非球面凹面镜反射的波前。波带片干涉仪也是一种共光路干涉仪，用波带片代替散射板，可以把特制的波带片等效为散射板。比较了散射板与波带板干涉仪的关系。在此基础上，提出并实现了两种可应用于共光路干涉仪的条纹扫描技术。最后，建立了计算机控制的条纹图采集与分析系统。少

项目成果

J.Huang;N.Ohyama;T.Honda: Optics Communications.

J.Huang；N.Ohyama；T.Honda：光学通信。

N.Ohyama;S.Kinoshita;A.Cornejo;T.Honda;J.Tsujiuchi: J.Opt.Soc.of Am.A. 5. 2019-2025 (1988)

N.Ohyama；S.Kinoshita；A.Cornejo；T.Honda；J.Tsujiuchi：J.Opt.Soc.of Am.A.

T. Honda;J. Hung;J. Tsujiuchi;J.C.Wyant: Proc. of 14th Congress of the International Commision for Optics. 351-352 (1987)

T.本田；J.

N. Ohyama; S. Kinoshita; A. Cornejo; T. Honda; J. Tsujiuchi: "Accuracy of phase determination with unequal reference phase shift" J. Opt. Soc. of Am. A. 5. 2019-2025 (1988)

N.奥山；

J.Huang;T.Honda;N.Ohyama;J.Tsujiuchi: Optics Communications. 68. 235-238 (1988)

J.Huang；T.Honda；N.Ohyama；J.Tsujiuchi：光学通信。